Mr. Lieu Chia Chuen Profile

Lieu Chia Chuen

Section Manager at Micron Semiconductor Asia

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Publications (1)

Proceedings Article | 19 March 2015 Paper

Overlay improvement using Legendre-Zernike model-based overlay corrections and monitoring with interpolated metric

Md Zakir Ullah, Rajanish Javvaji, Alan Lim, Lieu Chia Chuen, Boris Habets, Stefan Buhl, Georg Erley, Steven Tottewitz, Enrico Bellmann

Proceedings Volume 9424, 942420 (2015) https://doi.org/10.1117/12.2085013

KEYWORDS: Semiconducting wafers, Data modeling, Overlay metrology, Performance modeling, Model-based design, Process modeling, Coastal modeling, Zernike polynomials, Process control, Semiconductors

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