In the high-end optical instrument application, aspherical lenses have replaced spherical lenses and became a key component owing to the aberration correction characteristic it benefits. Though aspherical lenses truly provide multiple advantages, as long as the uncertainty and time-taking issue remain unsolved in CNC polishing process, the term “mass production” will still be far from realization. In this paper, we have developed a method based on Preston’s equation and the Hertz-Contact theorem (HCT) to construct the tool influence function (TIF), hoping to increase the convergence of the process result. We will also discuss how different tool offsets affect the polishing force against the workpiece. We firstly obtained velocity distribution between bonnet and workpiece from dynamics in polar coordinates, then applied the equivalent contacting-Young’s modulus in Hertz-Contact theorem to calculate the pressure distribution model. Subsequently, we conducted a series of experiments under IRP1000 by Zeeko Ltd. and avoided unstable outcomes caused by both machine vibration and deficient tool offset. We modified the parameters into five different feed rates while remaining the equivalent dwelling time, to create more observable features of material removed and further proved the linearity relationship between the dwell time and the removal depth. We applied LP66 as the polishing pad and fused silica as the workpiece to acquire the experiment result.
The poker chip assembly with high precision lens barrels is widely applied to ultra-high performance optical system. ITRC applies the poker chip assembly technology to the high numerical aperture objective lenses and lithography projection lenses because of its high efficiency assembly process. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module is equipped with a non-contact displacement sensor (NCDS) and an autocollimator (ACM). The NCDS and ACM are used to measure centration errors of the top and the bottom surface of a lens respectively; then the amount of adjustment of displacement and tilt with respect to the rotational axis of the turning machine for the alignment module can be determined. After measurement, alignment and turning processes on the ATS, the centration error of a lens cell with 200 mm in diameter can be controlled within 10 arcsec. Furthermore, a poker chip assembly lens cell with three sub-cells is demonstrated, each sub-cells are measured and accomplished with alignment and turning processes. The lens assembly test for five times by each three technicians; the average transmission centration error of assembly lens is 12.45 arcsec. The results show that ATS can achieve high assembly efficiency for precision optical systems.
In general, the drop-in and cell-mounted assembly are used for standard and high performance optical system respectively. The optical performance is limited by the residual centration error and position accuracy of the conventional assembly. Recently, the poker chip assembly with high precision lens barrels that can overcome the limitation of conventional assembly is widely applied to ultra-high performance optical system. ITRC also develops the poker chip assembly solution for high numerical aperture objective lenses and lithography projection lenses. In order to achieve high precision lens cell for poker chip assembly, an alignment turning system (ATS) is developed. The ATS includes measurement, alignment and turning modules. The measurement module including a non-contact displacement sensor and an autocollimator can measure centration errors of the top and the bottom surface of a lens respectively. The alignment module comprising tilt and translation stages can align the optical axis of the lens to the rotating axis of the vertical lathe. The key specifications of the ATS are maximum lens diameter, 400mm, and radial and axial runout of the rotary table < 2 μm. The cutting performances of the ATS are surface roughness Ra < 1 μm, flatness < 2 μm, and parallelism < 5 μm. After measurement, alignment and turning processes on our ATS, the centration error of a lens cell with 200mm in diameter can be controlled in 10 arcsec. This paper also presents the thermal expansion of the hydrostatic rotating table. A poker chip assembly lens cell with three sub-cells is accomplished with average transmission centration error in 12.45 arcsec by fresh technicians. The results show that ATS can achieve high assembly efficiency for precision optical systems.
The design of the rigid contact lens (CL) with slope-constrained Q-type aspheres for myopia correction is presented in this paper. The spherical CL is the most common type for myopia correction, however the spherical aberration (SA) caused from the pupil dilation in dark leads to the degradation of visual acuity which cannot be corrected by spherical surface. The spherical and aspheric CLs are designed respectively based on Liou’s schematic eye model, and the criterion is the modulation transfer function (MTF) at the frequency of 100 line pair per mm, which corresponds to the normal vision of one arc-minute. After optimization, the MTF of the aspheric design is superior to that of the spherical design, because the aspheric surface corrects the SA for improving the visual acuity in dark. For avoiding the scratch caused from the contact profilometer, the aspheric surface is designed to match the measurability of the interferometer. The Q-type aspheric surface is employed to constrain the root-mean-square (rms) slope of the departure from a best-fit sphere directly, because the fringe density is limited by the interferometer. The maximum sag departure from a best-fit sphere is also controlled according to the measurability of the aspheric stitching interferometer (ASI). The inflection point is removed during optimization for measurability and appearance. In this study, the aspheric CL is successfully designed with Q-type aspheres for the measurability of the interferometer. It not only corrects the myopia but also eliminates the SA for improving the visual acuity in dark based on the schematic eye model.
The i-line microlithographic lens with unity magnification can be applied for the 3D integrated circuit steppers. The configuration of the microlithographic lens can be divided into three types: the dioptric type, the catoptric type, and the mixed catoptric and dioptric type. The dioptric type with unity magnification is typically designed as symmetry about the aperture stop on both image and object sides to counterbalance aberrations effectively. The lens mounting is substantially critical for the diffraction-limit microlithographic lens, because mounting stresses and gravity degrade image quality severely. The surface deformation of the kinematic mounting is ultimately low, but the disadvantage is high cost and complicated structures. The three-point mounting belongs to the semi-kinematic mounting without over constrain to decrease the surface deformation significantly instead of the ring mounting; however, the disadvantage is the trefoil aberration caused from large-aperture lenses due to gravity. Clocking lenses is a practical method of compensating the surface figure error for optimum wavefront aberration during pre-assembly phase, and then the time and cost spent on the post-assembly for fine alignment reduce much. The self-compensation by two pairs of symmetric lenses on both sides with 60-degree angle difference is beneficial to compensate the trefoil aberration effectively, and it is a costeffective method to achieve the wavefront error close to the design value. In this study, the self-compensation method for the trefoil deformation of large-aperture lenses employed in the symmetric dioptric microlithographic lens is successfully verified in simulation.
The advantage of 3D printing technique is flexible in design and fabrication. Using 3D printing technique, the traditional manufacturing limitations are not considered. The optical lens is the key component in an optical system. The traditional process to manufacture optical plastic lens is injection molding. However injection molding is only suitable for plastics lens, it cannot fabricate optical and mechanical components at same time. The assembly error of optical system can be reduced effectively with fabricating optical and mechanical components at same time. The process of printing optical and mechanical components simultaneously is proposed in previous papers, but the optical surface of printing components is not transparent. If we increase the transmittance of the optical surface, the printing components which fabricated by 3D printing process could be high transmission. Therefore, precise diamond turning technique has been used to turning the surface of 3D printing optical lens in this paper. The precise diamond turning techniques could process surfaces of components to meet the requirements of optical system. A 3D printing machine, Stratasys Connex 500, and a precise diamond turning machine, Precitech Freeform705XG, have been used in this paper, respectively. The dimension, roughness, transmission and printing types of 3D printing components have been discussed in this paper. After turning and polishing process, the roughness of 3D printing component is below 0.05 μm and the transmittance increase above 80 %. This optical module can be used in hand-held telescope and other system which need lens and special mechanical structure fabricated simultaneously.
An absolute measurement method involving a computer-generated hologram to facilitate the identification of manufacturing form errors and mounting- and gravity-induced deformations of a 300-mm aspheric mirror is proposed. In this method, the frequency and magnitude of the curve graph plotted from each Zernike coefficient obtained by rotating the mirror with various orientations about optical axis were adopted to distinguish the nonrotationally symmetric aberration. In addition, the random ball test was used to calibrate the rotationally symmetric aberration (spherical aberration). The measured absolute surface figure revealed that a highly accurate aspheric surface with a peak-to-valley value of 1/8 wave at 632.8 nm was realized after the surface figure was corrected using the reconstructed error map.
This paper presents the validation of the design of a 6-in. f/2.2 dual-wavelength transmission sphere (TS) based on the Fizeau interferometer. The TS was verified at a wavelength of 632.8 nm and is compatible for measuring the transmitted wavefront error of an i-line lithography lens. The achromatic design is imperative for a dual wavelength TS and requires more lenses for correcting the chromatic focal shift. Because the overall weight of the TS should be controlled within the load range of the piezoelectric transducers of the interferometer, the fabrication and mounting of lenses with high aspect ratios are challengeable. The mounting of the reference surface based on three-point mounting was successful for the residual reference wavefront error under peak-to-valley (PV) λ/10. Furthermore, the reference wavefront is typically restricted within PV 5λ to avoid distorted interference fringes. Therefore, we built a double-pass interferometer model for tolerance analysis, and the error budget facilitated decision-making regarding the suitable specifications of lens manufacturing and assembly for cost efficiency. The test results demonstrated that the deformation of the reference wavefront and the residual reference wavefront error met the critical specification at 632.8 nm and that the achromatic TS is compatible for measuring i-line lithography lenses.
The design, tolerance sensitivity reduction, assembly, and optical bench test for an oil-immersion microscope objective with long working distance employed in a lattice light-sheet microscope is presented in this paper. In this application, the orthogonal excitation and detection objectives are dipped in an oil medium. The excitation objective focuses the incident laser beam to generate fluorescence on specimen for collecting by detection objective. The excitation objective is custom-designed to meet the requirement specification such as oil-immersion, the long working distance, and numerical aperture (NA) of 0.5, etc. To produce an acceptable point spread function (PSF) for effective excitation, the performance of the objective needs to be close to diffraction limit. Because the tolerance of the modulation transfer function (MTF) is more and more sensitive at higher spatial frequency, it is extremely critical to keep the performance after manufacture. Consequently, an insensitive optical design is very important for relaxing tolerance. We compare the design with and without tolerance sensitivity reduction, and the as-built MTF shows the result. Furthermore, the method for sensitivity reduction is presented. The opto-mechanical design and assembly method are also discussed. Eventually, the objective with five spherical lenses was fabricated. In optical bench test, the depth of the oil is sensitive to MTF, and it leads to the complicated adjustment. For solving this issue, we made an index-matching lens to replace oil for measurement easily. Finally, the measured MTF of the excitation objective can accomplish the requirement specification and successfully employed in a lattice light-sheet microscope.
ITRC dedicates in high precision optics for more than 40 years and focuses in lithography optics for projection system recently. The first project of the lithography optics in ITRC is an i-line Wynne-Dyson projection lens for 3D-ICs applications. The Wynne-Dyson projection lens is a classical design for unity magnification projection system. We take the advantages of the established benefits of Wynne-Dyson lens and modify it. ITRC‘s Wynne-Dyson lens is a 0.16 NA system with unity magnification, which is designed in double telecentricity and long working distance. The projection lens comprises three lenses and one concave mirror. Two aspheric surfaces are deployed in lens 1 and concave mirror. A lens with aspheric surfaces can correct for aberration and deliver a higher performance with fewer lens elements; therefore it has advantages of compact and light. However, aspheres are more difficult to fabricate and higher cost than spherical surface. In order to control the testability and manufacturability of the aspheric surface, the Q-type aspheric surfaces are applied in our design phase and manufacture process. We optimize for both performance and manufacturability by Q-type aspheric surfaces. Not only a testable and manufacturable asphere can be approached but also an additional benefits of less sensitive and cost-effective to manufacture to the required specification. In this paper, the Q-type aspheric surfaces and slope constraint are applied to a Wynne-Dyson projection lens, the testability of Q-type aspheric surfaces by the departure from best-fit-sphere and fringe density of interferometry are estimated. Furthermore, subaperture stitching interferometer system (ASI, from QED technologies) is also applied for testability comparison. The tolerance and sensitivity are also discussed. Finally, the results show a diffraction limit approached lens with testable aspheric surface is designed using Q-type aspheric surface. One of the asphere is 150 m departure from best-fit-sphere in 205 mm clear aperture, that can be tested by subaperture stitching interferometer system (ASI). The alignment tolerance of lens in decenter and tilt can be controlled in the range of ±30 micron and 20 arc-second, respectively.
The mounting design of a reference surface for a 6-in transmission sphere is presented in this paper. To achieve highprecision measurement in interferometry, the reference wavefront error should be controlled within peak-to-valley (PV) 0.1 λ (λ=0.6328 um) for subtraction in calibration. The reference wavefront error includes the system aberration error and the irregularity of the reference surface. When a transmission sphere is well aligned, the reference wavefront error is dominated by the reference surface. The mounting of the reference surface is imperative because the surface deformation of the reference surface after mounting needs to be lower than 0.1 λ. Besides the mounting deformation, self-weight deformation is also considerable for large optics, such as 6-in reference surface in our study. Consequently, a semikinematic mounting is applied using three small contact areas to avoid over constraint. The transmission sphere in our study is vertically tested on QED aspheric stitching interferometer (ASI), and then the trefoil aberration is occurred. There are two methods to decrease surface deformation after mounting, including deformation correction using computer control optical surfacing (CCOS) and adding soft supporting between hard mounting. In this study, three soft supports are used to share the loads of three rigid supports and then to minimize surface deformation due to gravity. Mounting design and experiments are described in this paper. Finally, the reference wavefront error of the prototype is successfully restrained within 0.1 λ in measurement.
Several mounting configurations could be applied to opto-mechanical design for achieving high precise optical system. The retaining ring mounting is simple and cost effective. However, it would deform the optics due to its unpredictable over-constraint forces. The retaining ring can be modified to three small contact areas becoming a semi-kinematic mounting. The semi-kinematic mounting can give a fully constrained in lens assembly and avoid the unpredictable surface deformation. However, there would be still a deformation due to self-weight in large optics especially in vertical setup applications. The self-weight deformation with a semi-kinematic mounting is a stable, repeatable and predictable combination of power and trefoil aberrations. This predictable deformation can be pre-compensated onto the design surface and be corrected by using CNC polisher. Thus it is a freeform surface before mounting to the lens cell. In this study, the freeform correction polishing is demonstrated in a Φ150 lens with semi-kinematic mounting. The clear aperture of the lens is Φ143 mm. We utilize ANSYS simulation software to analyze the lens deformation due to selfweight deformation with semi-kinematic mounting. The simulation results of the self-weight deformation are compared with the measurement results of the assembled lens cell using QED aspheric stitching interferometer (ASI). Then, a freeform surface of a lens with semi-kinematic mounting due to self-weight deformation is verified. This deformation would be corrected by using QED Magnetorheological Finishing (MRF® ) Q-flex 300 polishing machine. The final surface form error of the assembled lens cell after MRF figuring is 0.042 λ in peak to valley (PV).
The transmission sphere (TS) provides a high-quality reference wavefront which is common path with a test wavefront to generate interference fringes in a Fizeau interferometer. The optical path difference (OPD) of the reference wavefront should be controlled within peak-to-valley (PV) 5 λ (λ=0.6328 um), because too large OPD makes interference fringes distorted. Therefore, the tolerance analysis of the reference wavefront is very critical. Because the surface irregularity of lens can change the phase of a wavefront, surface deformation after mounting highly impacts on the wavefront error. For large optics, such as φ 6-inch in this study, surface deformation dominates the quality of the reference wavefront. For minimizing surface deformation after mounting, semi-kinematic mounting technology is used in sub-cells design to avoid over-constraint forces and unpredictable deformation. Then, the deformation due to gravity force of each surface can be constrained around PV 0.3 λ with Zernike trefoil in vertical setup TS; however, the superposition of the distorted wavefront may deteriorate the optical performance. A method of optimizing orientation of each lens around optical axis is presented in this paper. Sub-cells are designed to be rotational around optical axis respectively. The wavefront error of the reference beam of the worst case is improved significantly after optimization. Consequently, the method can effectively reduce the difficulty of lenses fabrication and mounting, and then the specification of the surface irregularity can be lower for cost saving. Based on the optimization in our study, a good reference wavefront can be acquired without any tight tolerance or complicated assembly.
The design of a 6-in, f/2.2 transmission sphere for Fizeau interferometry is presented in this paper. To predict the actual performance during design phase, we build an interferometer model combined with tolerance analysis in Zemax. Evaluating focus imaging is not enough for a double pass optical system. Thus, we study the interferometer model that includes system error, wavefronts reflected from reference surface and tested surface. Firstly, we generate a deformation map of the tested surface. Because of multiple configurations in Zemax, we can get the test wavefront and the reference wavefront reflected from the tested surface and the reference surface of transmission sphere respectively. According to the theory of interferometry, we subtract both wavefronts to acquire the phase of tested surface. Zernike polynomial is applied to transfer the map from phase to sag and to remove piston, tilt and power. The restored map is the same as original map; because of no system error exists. Secondly, perturbed tolerances including fabrication of lenses and assembly are considered. The system error occurs because the test and reference beam are no longer common path perfectly. The restored map is inaccurate while the system error is added. Although the system error can be subtracted by calibration, it should be still controlled within a small range to avoid calibration error. Generally the reference wavefront error including the system error and the irregularity of the reference surface of 6-in transmission sphere is measured within peak-to-valley (PV) 0.1 λ (λ=0.6328 um), which is not easy to approach. Consequently, it is necessary to predict the value of system error before manufacture. Finally, a prototype is developed and tested by a reference surface with PV 0.1 λ irregularity.
The lithography system in a high energy light source, the system refractive lens, absorbs the heat from the light source. The light source’s power is uniformly distributed on the reticle side. The incident rays’ power density is calculated by radiometry in each lens’ surface. The lens heat absorption ratio depends on the optical glass species, quality, and wavelength. The optical glass’ higher internal transmittance means less heat absorption; meanwhile, in different conditions, the lens’ refractive index will change with temperature. Other researchers have tried to calculate the lens temperature distribution; this study applies the Finite Element Method (FEM), radiometry, and ray tracing to solve the lens temperature distribution. Each incident ray’s path was separated into many sections, and the heat absorption was calculated for each section. Therefore, the heat generated in incident ray sections were weighted to finite element grids and the temperature distribution was solved. The lens’ non uniform temperature distribution will cause the incident ray’s Optical Path Difference (OPD). Each incident ray’s OPD can be fit by Zernike polynomials; the fitting results can be input into optical software to evaluate the thermal effect on lens heat absorption.
This study proposes an absolute measurement method with a computer-generated hologram (CGHs) to assist the identification of manufacturing form error, and gravity and mounting resulted distortions for a 300 mm aspherical mirror. This method adopts the frequency of peaks and valleys of each Zernike coefficient grabbed by the measurement with various orientations of the mirror in horizontal optical-axis configuration. In addition, the rotational-symmetric aberration (spherical aberration) is calibrated with random ball test method. According to the measured absolute surface figure, a high accuracy aspherical surface with peak to valley (P-V) value of 1/8 wave @ 632.8 nm was fabricated after surface figure correction with the reconstructed error map.
Cassegrain optical systems are widely used in remote sensing instrument. Cassegrain telescope is composed of a primary mirror (M1), a secondary mirror (M2), and a set of correction lenses. The system aberrations of telescope could be corrected and balanced by M1 and M2. In the event of deformation of telescope assembly, the non-symmetry aberrations will be induced to the optical system and reduce the optical performance. The non-symmetry aberrations can be measured after completing M1 and M2 assembly and alignment processes. Compensating this identified error to M1 or M2 can improve the optical performance of the telescope system. The error compensation on M2 is more efficient due to its smaller aperture and quickly assembly and de-assembly processes. In this study, we map the system wavefront error caused by deformation of mirror supporting and gravity onto the designed aspheric surface of M2. The surface of M2 becomes a freeform from aspheric. The polishing process combines the techniques of conventional lapping and CNC polishing. We apply the conventional spherical lapping process to quick remove the sub-surface damage (SSD) layer and to get the accurate radius of best fit sphere of the designed aspheric surface with fine surface texture simultaneously. The polishing and metrology processes were performed by using Zeeko IRP1000 polisher and QED ASI. A Φ 150 mm mirror with freeform surface was completed.
Stray light analysis of FormoSat-5 telescope has been studied. The geometric contour profiles of the baffles are
determined by checking the degree of blocked direct-incidence stray light. Trade-off between different baffle contours
has been made by comparing the direct-incidence stray light, incident energy ratio, and incident energy uniformity of the
focal plane assembly (FPA). Detail studies have then performed on the contribution of the stray light due to direct
incidence, scattering from components, and multi-reflection between optical components. The effect of the FPA
structure is also considered since it is the component adjacent the most to the FPA. In addition, the tolerance of the
baffles fabrication and assembly are introduced.
In this study, the measurement of a 160 mm convex hyperbolic mirror by using the 6 inches phase shifting interferometer
and the CGH (computer-generated hologram) in a vertical setup is presented. The wavefront errors of the metrology
system including the reference flat and CGH flat due to gravity effect are measured and calibrated by using random
testing and null cavity testing with and without CGH. Then, the real form error of each single sub-aperture could be
acquired by subtracting the system wavefront errors. In this study, we measured form errors of 10 off-axis sub-apertures
with equal angle space and then stitched them to establish the whole irregularity in the shape of the mirror in 160 mm
diameter. Finally, we imported the irregularity in the shape of the mirror to the CNC aspheric polishing machine for
correction polishing. Combining the aspheric metrology technique and the CNC aspheric polishing technique, a 160 mm
secondary mirror for the Cassegrain reflecting system was finished within PV 0.15μm and RMS 17.9 nm.
In this study, efficient polishing processes with inspection procedures for a large convex hyperbolic mirror of Cassegrain
optical system are presented. The polishing process combines the techniques of conventional lapping and CNC polishing.
We apply the conventional spherical lapping process to quickly remove the sub-surface damage (SSD) layer caused by
grinding process and to get the accurate radius of best-fit sphere (BFS) of aspheric surface with fine surface texture
simultaneously. Thus the removed material for aspherization process can be minimized and the polishing time for SSD
removal can also be reduced substantially. The inspection procedure was carried out by using phase shift interferometer
with CGH and stitching technique. To acquire the real surface form error of each sub aperture, the wavefront errors of
the reference flat and CGH flat due to gravity effect of the vertical setup are calibrated in advance. Subsequently, we
stitch 10 calibrated sub-aperture surface form errors to establish the whole irregularity of the mirror in 160 mm diameter
for correction polishing. The final result of the In this study, efficient polishing processes with inspection procedures for a large convex hyperbolic mirror of Cassegrain
optical system are presented. The polishing process combines the techniques of conventional lapping and CNC polishing.
We apply the conventional spherical lapping process to quickly remove the sub-surface damage (SSD) layer caused by
grinding process and to get the accurate radius of best-fit sphere (BFS) of aspheric surface with fine surface texture
simultaneously. Thus the removed material for aspherization process can be minimized and the polishing time for SSD
removal can also be reduced substantially. The inspection procedure was carried out by using phase shift interferometer
with CGH and stitching technique. To acquire the real surface form error of each sub aperture, the wavefront errors of
the reference flat and CGH flat due to gravity effect of the vertical setup are calibrated in advance. Subsequently, we
stitch 10 calibrated sub-aperture surface form errors to establish the whole irregularity of the mirror in 160 mm diameter
for correction polishing. The final result of the Fabrication of ф160 mm Convex Hyperbolic Mirror for Remote Sensing Instrument160 mm convex hyperbolic mirror is 0.15 μm PV and 17.9 nm RMS.160 mm convex hyperbolic mirror is 0.15 μm PV and 17.9 nm RMS.
Air-driving fluid jet polishing (FJP) technique was first presented in 2011. Slurry was drop out due to Venturi effect inside the atomizer which is the main component of air-driving FJP system, and was guided to mix with air flow by the nozzle. The Venturi effect and the added high speed air flow provide slurry more kinetic energy to impact the optical surface. Therefore, the air-driving FJP system has a rotational symmetrical Gaussian-like removal profile with lower air pressure and normal incidence configuration. In this paper, we investigate oblique incidence polishing to find the optimal material removal performance of the technique, including removal shape and depth and surface roughness. Different oblique angles ranged from 80 to 20 degree were tested. The air-driving FJP system was adapted upon a CNC machine, so not only single point polishing but also straight line polishing with constant feed rate can be carried out. We report on the performance of oblique air-driving FJP in different air pressure and processing time, and also the material removal of dynamic polishing for N-BK7, Fused Silica and ZERODUR®. The results indicate oblique incidence can get a Gaussian-like removal shape, and improve the surface roughness. The air-driving FJP not only has the advantages of conventional fluid jet polishing, such as no tool wears, cutter interference and debris deposition problems, but also has excellent material removal rate with lower energy.
Bi-directional viewer just likes a lens of camera. Unlike conventional camera lens, the bi-directional viewer captures not
only front view but also side view around the bi-directional viewer. The barrel of bi-directional viewer was designed to
have cuts in the side to allow side light to come through, and we use two aspherical mirrors to receive and change the
side light to converge on the main optical path. The front view and side view can be imaged simultaneously on an image
sensor. Commercial aspherized achromatic lens and micro video lens were also used to keep the image quality and
miniaturize the size of the bi-directional viewer respectively. We report on the development of bi-directional viewer,
including optical design, optical simulation, optomechanics design, fabrication techniques, assembly procedure and
performance testing. The MTF of the bi-directional viewer is also measured and discussed in this paper. We successfully
design and realize a bi-directional viewer, which can perform 100 lp/mm spatial frequency image in detail above 20%
contrast in the 7.6 mm front view area. And we keep the dimensions of this device within 35 mm in total length and Φ20
mm in diameter.
The effect of iso-static mount (ISM) configuration of the Cassegrain telescope primary mirror under thermal stress has
been studied. The material of mirror is selected to be Zerodur, and light weight ratio of mirror is 50%. The thermal stress
can lead to the thermal deformation and degradation of system MTF. Thermal deformation distribution of the mirror has
been calculated from the Finite Element Analysis software with the input of thermal distribution. Zernike polynomial
was then used to represent the mirror deformation such that the system MTF can be predicted. It is found that MTF of
the telescope system is sensitive for ISM arm angle ranging from 50 to 68 degrees.
In order to give consideration to both resolution and swath of airborne remote sensing instrument, pan-sharpening
method was used to get high resolution pan-sharpened image. This research provides a description of the optomechanical
system design and assembly of airborne imager, VCDi-660 (Vegetation and Change Detection imager).
Opto-mechanical components of VCDi-660 consist of six optical lenses, focal plane adjustment, bore sight alignment
adjustment, filter-exchanging mechanical device and circuit protected housing. An improved adjustment device for bore
sight alignment of the multiple-band camera in this Taiwanese airborne imaging sensor, VCDi-660, has been presented.
Target of this mechanical device is to provide a translational and rotational movement in the focal plane of VCDi-660.
Sensor can be aligned into the best focal position, thus the central point deviations for individual camera module can be
less than 3 pixels in both axes in image after alignment.
The baffle design and analysis of a panchromatic push-broom camera were investigated for a Cassegrain telescope in this
paper. A specially designed flower-look baffle is surrounded by the hole of the primary mirror and secondary mirror.
With this design, the flower-look baffle can block the direct-hit stray light and reduce the off-axis field of view (FOV)
vignetting. The modulation transfer function (MTF) of this design is increased 10 % as compared to the performance of
the traditional baffles. This camera is equipped with a large field of view (FOV) which can get a wide swath and can
provide high-resolution image for observation and monitoring of environmental pollution and disaster. The optical
system assembly (OSA) of the camera is a kind of Cassegrain telescope which contains two reflection mirrors and five
corrected lenses. Compared with other off-axis telescopes, this traditional optical configuration can be manufactured and
aligned much easily. In a large FOV Cassegrain design, the central hole of the primary mirror is larger than that in a
traditional Cassegrain design. The rays out from FOV pass though the central hole easily and reach the focal plan
assembly (FPA) directly. This kind of stray light carries strong energy flux which significantly reduces the image
performance. A baffle subsystem is needed in order to avoid the direct stray light exposure. The performance evaluation
of the baffle system and the MTF comparison results from two kinds of baffle shapes are included in this study. It
indicates that the flower-look shape is more efficient in keeping the relative illumination and MTF than traditional tube
shape. The maximum benefit of the flower-look baffle is found for increasing off-axis tangential MTF.
It is shown that a simple achromatic polarization-preserving beam displacer can be realized in the Porro's two-prism image erector system. The theory of geometric phase and compensating phase shifting is used to illustrate the mechanism of achromatic property in the system. Tilting tolerance and the influence of material, such as CaF2 and plactic materials, are also addressed. The tilting errors of each component or totally internal reflected surface will not seriously affect the performance.
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