Charmaine Goh
at A*STAR Institute of Microelectronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2024 Presentation + Paper
Proceedings Volume 12898, 1289802 (2024) https://doi.org/10.1117/12.3002146
KEYWORDS: Silicon nitride, Waveguides, Semiconducting wafers, Plasma enhanced chemical vapor deposition, Silicon photonics, Film thickness, Fabrication, Chemical mechanical planarization, Photonic integrated circuits

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