Prof. Catherine Dubourdieu Profile

Prof. Catherine Dubourdieu

at Helmholtz-Zentrum Berlin

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Author

Publications (2)

Proceedings Article | 5 March 2022 Presentation

Back-gated devices from amorphous GaOx grown by ALD for BEOL integration

Catherine Dubourdieu, Charlotte Van Dijck, Sourish Banerjee, Florian Maudet, Veeresh Deshpande

Proceedings Volume PC12002, PC120020G (2022) https://doi.org/10.1117/12.2620759

KEYWORDS: Oxides, Back end of line, Atomic layer deposition, Gallium, Transistors, Zinc oxide, Silicon, Oxygen, Zinc, Wide bandgap semiconductors

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Proceedings Article | 27 August 2003 Paper

Optical characterization of high-k dielectrics HfO₂ thin films obtained by MOCVD

Mircea Modreanu, P. Hurley, B. O'Sullivan, Breda O'Looney, Jean-Pierre Senateur, H. Rousell, F. Rousell, M. Audier, C. Dubourdieu, Ian Boyd, Q. Fang, T. Leedham, S. Rushworth, A. Jones, Hywel Davies, C. Jimenez

Proceedings Volume 4876, (2003) https://doi.org/10.1117/12.463984

KEYWORDS: Chemical vapor deposition, Hybrid fiber optics, Annealing, Ultraviolet radiation, Thin films, Interfaces, Refractive index, Statistical modeling, FT-IR spectroscopy, Oxygen

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