Unspecified ByungHyun Hwang Profile

ByungHyun Hwang

at SAMSUNG Electronics Co., Ltd.

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

On-cell thickness monitoring of chalcogenide alloy layer using spectral interferometry, Raman spectroscopy, and hybrid machine learning

Hyunwoo Ryoo, Seul Ji Song, Min Ji Jeon, Juhyun Moon, JiHye Lee, ByungHyun Hwang, Jeongho Ahn, Yoon-jong Song, Hidong Kwak, Lior Neeman, Noga Meir, Jaehong Jang, Ik Hwan Kim, Hyunkyu Kim

Proceedings Volume 12955, 129550G (2024) https://doi.org/10.1117/12.3012496

KEYWORDS: Raman spectroscopy, Transmission electron microscopy, Interferometry, Semiconducting wafers, Signal intensity, Machine learning, Film thickness, Diffractive optical elements, Chalcogenides, Calibration

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