Dr. Bai Xu Profile

Dr. Bai Xu

Senior Scientist at SUNY/Univ at Albany

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Author

Publications (29)

SPIE Journal Paper | 1 April 2006

Novel microfabrication approach of embedded SU8^TM fluidic networks for cell transport on chips

Alison Gracias, Xiaojun Feng, Bai Xu, James Castracane

JM3, Vol. 5, Issue 02, 021102, (April 2006) https://doi.org/10.1117/12.10.1117/1.2200674

KEYWORDS: Ultraviolet radiation, Fourier transforms, Microfabrication, Microfluidics, Silicon, Biosensors, Wafer bonding, Semiconducting wafers, Roads, Polymers

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SPIE Journal Paper | 1 April 2006

Integrated cantilever development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Robert Geer, James Castracane, Bai Xu

JM3, Vol. 5, Issue 02, 021107, (April 2006) https://doi.org/10.1117/12.10.1117/1.2200887

KEYWORDS: Zinc oxide, Actuators, Semiconducting wafers, Ultrasonics, Scanning probe microscopy, Etching, Electrodes, Oxides, Imaging systems, Silicon

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Proceedings Article | 10 February 2006 Paper

Novel spatially distributed porous Si optical bandpass filters

N. Tokranova, I. Levitsky, A. Gracias, B. Xu, J. Castracane

Proceedings Volume 6128, 612806 (2006) https://doi.org/10.1117/12.640871

KEYWORDS: Silicon, Electrodes, Optical filters, Aluminum, Semiconducting wafers, Reflectivity, Bandpass filters, Optical microcavities, Refractive index, Interference filters

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Proceedings Article | 6 January 2006 Paper

Wafer bonding for 3D integration of MEMS/CMOS

Alison Gracias, James Castracane, Bai Xu

Proceedings Volume 6111, 61110O (2006) https://doi.org/10.1117/12.646467

KEYWORDS: Semiconducting wafers, Wafer bonding, Microelectromechanical systems, Silicon, System on a chip, Polymers, Interfaces, CMOS technology, Standards development, Sensors

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SPIE Journal Paper | 1 October 2005

Low-power MOEMS components for active optical systems

James Castracane, Dong Yan, Seth Madison, Ganesh Panaman, Bai Xu

JM3, Vol. 4, Issue 04, 041702, (October 2005) https://doi.org/10.1117/12.10.1117/1.2121087

KEYWORDS: Microopto electromechanical systems, Prototyping, Electrodes, Semiconducting wafers, Microelectromechanical systems, Diffraction gratings, Electromechanical design, Optical fabrication, Gold, Polymers

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Proceedings Article | 9 May 2005 Paper

Integrated cantilever fabrication and system development for ultrasonic and acoustic scanning probe microscopy

Stephen Olson, Balasubramanian Sankaran, Bruce Altemus, Bai Xu, Robert Geer

Proceedings Volume 5766, (2005) https://doi.org/10.1117/12.607770

KEYWORDS: Zinc oxide, Etching, Actuators, Semiconducting wafers, Ultrasonics, Electrodes, Silicon, Metals, Photomasks, Scanning probe microscopy

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Proceedings Article | 4 April 2005 Paper

Hybrid solar cells based on organic material embedded into porous silicon

Natalya Tokranova, Igor Levitsky, Bai Xu, James Castracane, William Euler

Proceedings Volume 5724, (2005) https://doi.org/10.1117/12.590945

KEYWORDS: Silicon, Solar cells, Photovoltaics, Organic materials, Reflectivity, Semiconductors, Electrochemical etching, Copper, Gold, Electrodes

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Proceedings Article | 22 January 2005 Paper

Microfabricated devices for bio-applications

Xiaojun Feng, Ben Szaro, Alison Gracias, Sofie Baselmans, Natalya Tokranova, Bai Xu, James Castracane

Proceedings Volume 5718, (2005) https://doi.org/10.1117/12.591618

KEYWORDS: Fourier transforms, Silicon, Prototyping, Electrodes, Microfabrication, Acquisition tracking and pointing, Microfluidics, Silicon films, Lab on a chip, Calcium

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Proceedings Article | 22 January 2005 Paper

Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators

Steve Olson, Bruce Altemus, Balasubramanian Sankaran, Natalya Tokranova, Robert Geer, James Castracane, Bai Xu

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.591024

KEYWORDS: Silicon, Semiconducting wafers, Atomic force microscopy, Boron, Actuators, Metals, Etching, Oxides, Resistance, Finite element methods

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Proceedings Article | 24 January 2004 Paper

Low power MOEMS components for active optical systems

James Castracane, Dong Yan, Seth Madison, Bai Xu

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524917

KEYWORDS: Microopto electromechanical systems, Electrodes, Prototyping, Semiconducting wafers, Diffraction gratings, Microelectromechanical systems, Photomasks, Gold, Control systems, Diffraction

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The eventual, widespread insertion of Micro-Opto-Electro-Mechanical Systems (MOEMS) into the marketplace rests fundamentally on the ability to produce viable components that maximize optical performance while minimizing power consumption and size. In addition, the incorporation of optical reconfigurability into custom MOEMS devices offers an extra degree of freedom not possible with conventional components. Active control of surface topology allows for one component to perform multiple functions thus reducing cost and complexity. This paper will focus on the current status of the MOEMS research program at the University at Albany Institute for Materials’ (UAIM) NanoFab 200 with several examples described to illustrate component and system development. In particular, among the MOEMS research portfolio at UAIM, the development of selected MOEMS-based, active optics will be discussed. This active control of diffraction and reflection forms the basis for the utility of such devices. Leveraging the extensive research expertise on the patented MEMS Compound Grating (MCG), emphasis will be placed on the extension of the approach to novel designs, materials and fabrication methods to yield low power, high performance prototypes. The main focus of this paper is on the development of a polymer version (including sacrificial layer, in some designs) of the MCG which allows for ease of fabrication and a reduced electrostatic actuation voltage. Following a system design effort, several generations of the component were fabricated to optimize the process flow. Component metrology, electromechanical characterization and initial results of optical tests will be reported. A second example presented is the design and prototype fabrication of a spring micrograting using a customized SOI process. This highly flexible component builds on the MCG concept and yields an order of magnitude reduction in actuation voltage. These examples will be presented against a backdrop of the broad UAIM program to provide an overview of the applications of MOEMS and their integration with complementary technologies at the wafer level.

Proceedings Article | 23 December 2003 Paper

Cantilever-based mass sensor for immunodetection of multiple bioactive targets

Tang Tang, Bai Xu, John Welch, James Castracane

Proceedings Volume 5345, (2003) https://doi.org/10.1117/12.524925

KEYWORDS: Proteins, Sensors, Gold, Target detection, Silicon, Electrodes, Semiconducting wafers, Biosensors, Molecules, Solids

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Proceedings Article | 23 December 2003 Paper

Reliability study of wafer bonding for micro-electro-mechanical systems

Mahmoud Almasri, Bruce Altemus, Alison Gracias, Larry Clow, Natalya Tokranova, James Castracane, Bai Xu

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524934

KEYWORDS: Semiconducting wafers, Wafer bonding, Interfaces, Silicon, Microelectromechanical systems, Temperature metrology, Reliability, System on a chip, Polymers, Scanning electron microscopy

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Proceedings Article | 29 April 2003 Paper

Micro-deformation measurement using focused ion beam moire method

Huimin Xie, Biao Li, Robert Geer, Bai Xu, James Castracane, Fulong Dai

Proceedings Volume 5058, (2003) https://doi.org/10.1117/12.509789

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Proceedings Article | 23 January 2003 Paper

Progress of ICC Alpha-Cell microbolometer development program

Kevin Liddiard, Jonathan Knauth, Ryan Decker, Bruce Altermus, Bai Xu, Nigel Robinson

Proceedings Volume 4820, (2003) https://doi.org/10.1117/12.451217

KEYWORDS: Sensors, Resistance, Amorphous silicon, Microbolometers, Semiconducting wafers, Silicon, Cameras, Readout integrated circuits, Semiconductors, Plasma enhanced chemical vapor deposition

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Proceedings Article | 21 January 2003 Paper

MOEMS device design, development, and integration for interconnect applications

James Castracane, Bai Xu, Seth Madison, Jaap Verheggen, Dong Yan

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477926

KEYWORDS: Prototyping, Microopto electromechanical systems, Reflectivity, Electrodes, Chemical elements, Optical interconnects, Microelectromechanical systems, Optical testing, Integrated optics, Optical fabrication equipment

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Proceedings Article | 17 January 2003 Paper

Novel design and fabrication of a microcentrifuge for biomedical and biochemical applications

Dong Yan, Bai Xu, James Castracane

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478163

KEYWORDS: Electrodes, Biomedical optics, Sensors, Finite element methods, Electromechanical design, Modeling and simulation, Microelectromechanical systems, BioMEMS, 3D modeling, Microfluidics

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Proceedings Article | 17 January 2003 Paper

Micro-array development for cell secretion studies

Xiaojun Feng, Natalya Tokranova, Bai Xu, Peng Chen, Kevin Gillis, James Castracane

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478153

KEYWORDS: Silicon, Etching, Oxides, Electrodes, Semiconducting wafers, Prototyping, Gold, Microfluidics, Plasma enhanced chemical vapor deposition, Metals

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Proceedings Article | 17 January 2003 Paper

Design and development of application-specific microfluidic components for flow control

Bai Xu, James Castracane, Bruce Altemus, Jeroen Keijmel, Martijn Heuzinkveld

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478149

KEYWORDS: Microfluidics, Electrodes, Polymers, Control systems, Microelectromechanical systems, Multiphoton fluorescence microscopy, Research management, Silicon, Prototyping, Biomedical optics

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Proceedings Article | 3 September 2002 Paper

Analysis and testing of an optical add/drop multiplexer based on MEMS micro-actuators

Dong Yan, Seth Madison, Bai Xu, James Castracane

Proceedings Volume 4907, (2002) https://doi.org/10.1117/12.482263

KEYWORDS: Multiplexers, Diffraction, Diffraction gratings, Microelectromechanical systems, Optical communications, Analytical research, Prototyping, Switches, Optical testing, Electrodes

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Proceedings Article | 21 June 2002 Paper

Novel microfabricated device to measure hormone/neurotransmitter release with millisecond temporal resolution

Kevin Gillis, Peng Chen, Bai Xu, Natalya Tokranova, Xiaojun Feng, James Castracane

Proceedings Volume 4626, (2002) https://doi.org/10.1117/12.472103

KEYWORDS: Electrodes, Temporal resolution, Microfabrication, Silicon, Neurotransmitters, Diffusion, Carbon, Gold, Measurement devices, Biosensors

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Proceedings Article | 10 June 2002 Paper

Diffractive micro-arrays for active spectroscopy and interconnect applications

James Castracane, Bai Xu, Olga Gutin, Rein Lavrijsen, Andrew Stollenwerk

Proceedings Volume 4647, (2002) https://doi.org/10.1117/12.469823

KEYWORDS: Microopto electromechanical systems, Prototyping, Spectrometers, Electrodes, Microelectromechanical systems, Chemical elements, Spectroscopy, Switching, Spectroscopes, Optical components

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Proceedings Article | 3 June 2002 Paper

Cantilever microscanners for free-space optical interconnects

Bai Xu, Natalya Tokranova, James Castracane, Dong Yan

Proceedings Volume 4652, (2002) https://doi.org/10.1117/12.469569

KEYWORDS: Scanners, Electrodes, Mirrors, Optical interconnects, Feedback control, Microelectromechanical systems, 3D modeling, Computer simulations, Data modeling, Actuators

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Proceedings Article | 10 October 2001 Paper

ICC silicon microbolometer development program

Kevin Liddiard, Jonathan Knauth, Steven Balick, Bai Xu, Nigel Robinson

Proceedings Volume 4369, (2001) https://doi.org/10.1117/12.445298

KEYWORDS: Sensors, Microbolometers, Silicon, Staring arrays, Silicon films, Semiconducting wafers, Readout integrated circuits, Bolometers, Amorphous silicon, Thin films

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Proceedings Article | 2 October 2001 Paper

Nanoscale elastic imaging of micro-electro-mechanical system based micromirrors

Bruce Altemus, Gajendra Shekhawat, Bai Xu, Robert Geer, James Castracane

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442995

KEYWORDS: Micromirrors, Mirrors, Atomic force microscopy, Ultrasonics, Switching, Reliability, Imaging systems, Microelectromechanical systems, Gold, Electrodes

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Proceedings Article | 2 October 2001 Paper

Component development and integration issues for MOEMS

James Castracane, Bai Xu, Yahong Yao, Christian Baks, Rein Lavrijsen

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443087

KEYWORDS: Microopto electromechanical systems, Vertical cavity surface emitting lasers, Semiconducting wafers, Reflectivity, Prototyping, Optical testing, Sensors, Wafer-level optics, Integrated optics, Packaging

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Proceedings Article | 28 September 2001 Paper

Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining

Yahong Yao, Bai Xu, James Castracane

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442953

KEYWORDS: Electrodes, Annealing, Ions, Nickel, Aluminum, Optical fabrication, Reactive ion etching, Gold, Silicon, Photomasks

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Proceedings Article | 15 May 2001 Paper

Component development and integration issues for bio/chemometric appliations of VCSEL and MOEMS arrays

James Castracane, Christian Baks, Serge Oktyabrsky, Bai Xu, Yahong Yao

Proceedings Volume 4284, (2001) https://doi.org/10.1117/12.426866

KEYWORDS: Microopto electromechanical systems, Vertical cavity surface emitting lasers, Chemical analysis, Analytical research, Tin, Biological research, System on a chip, Statistical analysis, Quantum wells, Reflectivity

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Proceedings Article | 25 August 2000 Paper

Process development and fabrication of application-specific microvalves

Bai Xu, James Castracane, Robert Geer, Yahong Yao, Bruce Altemus

Proceedings Volume 4174, (2000) https://doi.org/10.1117/12.396446

KEYWORDS: Aluminum, Semiconducting wafers, Silicon, Etching, Sputter deposition, Actuators, Deposition processes, Metals, Oxides, Scanning electron microscopy

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Proceedings Article | 22 August 2000 Paper

MOEMS arrays for interconnect applications

James Castracane, Bai Xu, Christian Baks, Mikhail Gutin, Olga Gutin

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396482

KEYWORDS: Microopto electromechanical systems, Prototyping, Reflectivity, Micromirrors, Digital micromirror devices, Optical communications, Optical testing, Diffraction gratings, Sensors, Optical interconnects

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Showing 5 of 29 publications

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