We propose a hybrid laser microfabrication approach for the manufacture of UV photochemical fused silica microchannel reactors using ultrafast laser-assisted etching combined with carbon dioxide laser irradiation. The manufactured glass microchannel reactors not only enable high transmission rates of multi-wavelength UV light irradiation but also allow micro-flow high-pressure and high-temperature intensification. As a proof-of-concept of this approach, one-step continuous-flow synthesis of vitamin D3 in the manufactured reactors is demonstrated.
Ultrafast laser-assisted etching provides a simple and flexible method for the bonding-free manufacture of glass-based microchannels with three-dimensional (3D) configurations and multiple functionalities. However, when the lengths of the required microchannels reach several centimeters, this method often suffers from manufacturing controllability due to the limitation of etching selectivity. Herein, we demonstrate our progress in 3D manufacturing large-scale fused silica microfluidic chips based on a hybrid laser microfabrication approach, which combines the merits of ultrafast laserassisted etching and carbon dioxide laser-induced melting. In this approach, extra-access ports are introduced to enhance the homogeneity of laser-fabricated 3D microchannels and subsequently sealed using defocusing carbon dioxide laser irradiation to form all-glass closed microchannels with few inlets and outlets. Moreover, we introduce some important applications of fabricated microfluidic chips.
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