Dr. Andrew J. Comley Profile

Dr. Andrew J. Comley

Development Engineer at Powerlase Photonics Ltd

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Author

Publications (4)

Proceedings Article | 6 May 2005 Paper

Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source

Samir Ellwi, Andrew Comley, Nick Hay, Ian Henderson, Michael Brownell

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.598721

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Multiplexing, Plasma, Semiconductor lasers, Xenon, Laser applications, Diodes, Tin, Laser development

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Proceedings Article | 20 September 2004 Paper

A high-power short-pulse laser for EUV source generation using laser-produced plasma and achieving low cost of ownership

Andy Comley, Samir Ellwi, Nick Hay, Michael Brownell

Proceedings Volume 5448, (2004) https://doi.org/10.1117/12.549228

KEYWORDS: Extreme ultraviolet, Plasma, Xenon, Multiplexing, Pulsed laser operation, High power lasers, Tin, Extreme ultraviolet lithography, Laser development, CCD cameras

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Proceedings Article | 20 May 2004 Paper

High-power short-pulse laser modules for laser-produced-plasma EUV source

Samir Ellwi, Andrew Comley, N. Hay, Michael Brownell

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.534015

KEYWORDS: Extreme ultraviolet, Xenon, Plasma, High power lasers, Tin, Extreme ultraviolet lithography, Pulsed laser operation, Solids, Laser development, Laser applications

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Proceedings Article | 13 September 2002 Paper

EUV light source and laser considerations for scalability and high-energy conversion efficiency

Ian Mercer, Andrew Comley, Sebastian Davis-Ansted, Michael Egan, Samir Ellwi, Paul Harrison, Ian Henderson, Matt Kelly, Michael Mason, Mark Middleton, Ian Morris, Duncan Parsons-Karavassilis, Terrance Nowell, Peter Raven, Adrain Russel, David Klug, Alan Taylor

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482129

KEYWORDS: Extreme ultraviolet, Pulsed laser operation, Plasma, EUV optics, Switching, Laser energy, Multiplexing, Laser optics, Diodes, Semiconductor lasers

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