Dr. Alexander V. Padiy Profile

Dr. Alexander V. Padiy

at Koninklijke Philips NV

SPIE Involvement:

Author

Publications (4)

SPIE Journal Paper | 7 January 2014

Holistic optimization architecture enabling sub-14-nm projection lithography

Jan Mulkens, Paul Hinnen, Michael Kubis, Alexander Padiy, Jos Benschop

JM3, Vol. 13, Issue 01, 011006, (January 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011006

KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Lithography, Reticles, Metrology, Control systems, Projection lithography, Calibration, Actuators

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Proceedings Article | 12 April 2013 Paper

High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

Jan Mulkens, Michael Kubis, Paul Hinnen, Roelof de Graaf, Hans van der Laan, Alexander Padiy, Boris Menchtchikov

Proceedings Volume 8683, 86831J (2013) https://doi.org/10.1117/12.2011550

KEYWORDS: Semiconducting wafers, Scanners, Overlay metrology, Metrology, Lithography, Actuators, Calibration, Reticles, Photomasks, Control systems

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Proceedings Article | 9 September 2004 Paper

Near-field read-out of a 50-GB first-surface disc with NA=1.9 and a proposal for a cover-layer-incident, dual-layer near-field system

Ferry Zijp, Martin van der Mark, Julian Lee, Coen Verschuren, Benno Hendriks, Marcello Balistreri, H. Paul Urbach, Michael van der Aa, Alexander Padiy

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.562376

KEYWORDS: Near field, Laser induced plasma spectroscopy, Strontium, Optical storage, Information operations, Wavelet packet decomposition, Lithium, Solids, Actuators

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Proceedings Article | 9 September 2004 Paper

Signal processing for 35GB on a single-layer Blu-ray disc

Alexander Padiy, Bin Yin, Coen Verschuren, Julian Lee, Ruud Vlutters, Theo Jansen

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.562297

KEYWORDS: Signal processing, Signal detection, Sensors, Optical tracking, Error analysis, Optical filters, Optical storage, Satellites, Signal to noise ratio, Detection and tracking algorithms

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