In this work, a flexible transparent CMUT array is fabricated for through-illumination photoacoustic applications in which shape conformality is required. The array is composed of glass pieces with transparent structural layers on them, which are connected to each other via PDMS, making the array flexible. Unlike the previous flexible devices in the literature, the array is very robust to bending. The photoacoustic image of a wire target was successfully reconstructed using the fabricated flexible transparent CMUT array. The fabricated device offers promise for future photoacoustic tomography systems with through-array illumination.
We introduce transparent TOBE CMUT arrays for multimodal imaging systems, combining ultrasound with photoacoustic and optical imaging systems. We designed and fabricated a 128-element lambda-pitch transducers with high transparency ranging from visible to near-infrared.
We introduce transparent TOBE CMUT arrays for multimodal optical camera imaging, ultrasound imaging and photoacoustic imaging. We used an adhesive wafer bonding process technique to fabricate the 128-element lambda-pitch transducers and achieve high transparency ranging from visible to near-infrared with ultrasound center frequencies of 7.5-9 MHz. The arrays are anticipated to have utility for endoscopic, intravascular, and intra-operative probes for multimodal interventional guidance.
We introduce Capacitive Micromachined Optical Focusing (CMOF) MEMS consisting of a miniature circular mirrored-membrane which can be electrostatically actuated to change mirror curvature. The central deflection zone is a close approximation to a parabolic mirror. The device is fabricated with minimal membrane mass to be only slightly larger than a diffraction-limited focus of a Gaussian beam. This device is a good candidate for fast tuning of the radius of curvature of laser beams at greater than MHz tuning rates, a feat difficult to achieve with current technologies. We present the design, modeling, and fabrication of a high-speed focusing CMOF MEMS platform. We have developed an equivalent circuit model for CMOFs which is capable of full nonlinear analyze of the CMOFs, and it is validated by ANSYS finite element method (FEM) simulations. By using the equivalent circuit model the non-linear transient response of a CMOF can be rapidly obtained and controlled with nonlinear control systems. The first generation of the proposed device is fabricated with a sacrificial-release process. Fabricated CMOFs have a silicon nitride membrane with 32um radius and 300nm gap spacing between top and bottom electrode. These CMOFs can effectively change their focal length from infinity to 3mm. We tested the device in an optical lens-assembly, and recorded 1mm focal point change by only 100nm deflection on the CMOF surface as measured using a Shack-Hartman wavefront sensor.
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