5 December 2024 Design and analysis of multi-layer Si3N4 waveguide coil for integrated optical gyroscope
Yue Chen, Zhenkun Yuan, Dingbo Chen, Xiangning Wei, Huan Chen, Zihan Shen, Zhaojian Zhang, Xin He, Yang Yu, Fen Zhao, Zhenrong Zhang, Junbo Yang, Minming Geng
Author Affiliations +
Abstract

The integrated optical gyroscope is a highly possible way to achieve chip-level gyroscopes. We proposed and simulated a three-dimensional Si3N4 optical interconnect platform. It transforms the waveguide coil from a single-layer structure to a multi-layer structure, which can increase the sensing area of the coil under the same footprint. The proposed platform with low interlayer transition loss and crossing loss can reduce the overall loss in the coil and improve the theoretical angular random walk (ARW). A quadruple-layer sensing coil with a maximum radius of 30 mm and a total length of 2.08 m is derived, which can attain an ARW of 0.15 deg/h and an insertion loss of 3.15 dB in theory.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Yue Chen, Zhenkun Yuan, Dingbo Chen, Xiangning Wei, Huan Chen, Zihan Shen, Zhaojian Zhang, Xin He, Yang Yu, Fen Zhao, Zhenrong Zhang, Junbo Yang, and Minming Geng "Design and analysis of multi-layer Si3N4 waveguide coil for integrated optical gyroscope," Optical Engineering 63(12), 127102 (5 December 2024). https://doi.org/10.1117/1.OE.63.12.127102
Received: 5 July 2024; Accepted: 21 November 2024; Published: 5 December 2024
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KEYWORDS
Waveguides

Silicon

Gyroscopes

Design

Integrated optics

Optical engineering

Silica

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