15 October 2021 Three-beam conjugate enhanced micro-vibration detection
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Abstract

We investigate the three-beam conjugate enhanced micro-vibration detection system. We introduce a conjugate light to the classical dual-beam heterodyne laser vibrometer to generate the three-beam interference. Detection of the micro-vibration signal is then enhanced by matching the power and phase of conjugate light and measured light. We also present the basic principle of three-beam conjugate enhanced micro-vibration detection and the conjugate enhancement conditions. Moreover, the expressions of micro-vibration signal amplitude amplification and resolution enhancement are derived and compared with the demodulation amplitude and limited resolution of classical dual-beam laser vibrometer. Experiments and numerical results further verify the amplitude amplification and resolution enhancement of the three-beam conjugate enhanced micro-vibration system. The archived results indicate that this system is especially suitable for the high-resolution detection of weak vibration targets, e.g., micro-nano structures.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Xinxin Kong, Libin Xiang, Qisheng Cai, Wenxi Zhang, Zhou Wu, Yu Dai, and Liang Hu "Three-beam conjugate enhanced micro-vibration detection," Optical Engineering 60(10), 104104 (15 October 2021). https://doi.org/10.1117/1.OE.60.10.104104
Received: 21 April 2021; Accepted: 28 September 2021; Published: 15 October 2021
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KEYWORDS
Optical testing

Target detection

Signal to noise ratio

Demodulation

Heterodyning

Resolution enhancement technologies

Signal detection

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