Open Access
25 August 2020 Traceable calibration of Shack–Hartmann wavefront sensors employing spherical wavefronts
Johannes Bautsch, Markus Schake, Gerd Ehret, Ulrich Berg, Lorenz Wagner, Johannes Pfund, Rainer Tutsch
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Abstract

Traceable, highly accurate calibration of wavefront sensors such as Shack–Hartmann sensors is a challenging task and an active field of research. We have developed a measurement system for the traceable calibration of wavefront sensors employing spherical wavefronts and a point light source in combination with a three-axis linear stage. We obtain an absolute calibration of sensor errors, including the reference spot position and wavefront gradient-dependent errors for each microlens individually. We discuss the main error influences and present an initial measurement uncertainty budget for the calibration. The calibration can be performed with an expanded measurement uncertainty (95% coverage interval) of better than 5  μrad for the wavefront gradient deviation.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Johannes Bautsch, Markus Schake, Gerd Ehret, Ulrich Berg, Lorenz Wagner, Johannes Pfund, and Rainer Tutsch "Traceable calibration of Shack–Hartmann wavefront sensors employing spherical wavefronts," Optical Engineering 59(8), 084104 (25 August 2020). https://doi.org/10.1117/1.OE.59.8.084104
Received: 15 May 2020; Accepted: 29 July 2020; Published: 25 August 2020
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Cited by 1 scholarly publication.
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KEYWORDS
Wavefronts

Microlens

Calibration

Sensors

Wavefront sensors

Image sensors

Light sources

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