Optical waveguides fabricated by nitrogen ion implantation in fused silica

Chun-Xiao Liu; Li-Li Fu; Rui-Lin Zheng; Hai-Tao Guo; Zhi-Guang Zhou; Wei-Nan Li; She-Bao Lin; Wei Wei

doi:10.1117/1.OE.55.2.027105

18 February 2016 Optical waveguides fabricated by nitrogen ion implantation in fused silica

Chun-Xiao Liu, Li-Li Fu, Rui-Lin Zheng, Hai-Tao Guo, Zhi-Guang Zhou, Wei-Nan Li, She-Bao Lin, Wei Wei

Author Affiliations +

Funded by: National Natural Science Foundation of China (NSFC), National Natural Science Foundation of China, Natural Science Foundation of China, NUPTSF, Nanjing University of Posts and Telecommunications Scientific Foundation (NUPTSF), Research Center of Optical Communications Engineering Technology

Optical Engineering, Vol. 55, Issue 2, 027105 (February 2016). https://doi.org/10.1117/1.OE.55.2.027105

Abstract

We report on the fabrication of waveguides in fused silica using 4.5-MeV nitrogen ion implantation with a fluence of 5.0×10¹⁴ ions/cm². The prism-coupling method was employed to measure the effective refractive indices of guiding modes at the wavelengths of 632.8 and 1539 nm. The effective refractive indices of the first few modes were higher than that of the substrate. The refractive index profiles at 632.8 and 1539 nm were reconstructed by the reflectivity calculation method. Positive index changes were induced in the waveguide layers. The end-face coupling method was used to measure the near-field light intensity distributions at the wavelength of 632.8 nm and the finite-difference beam propagation method was applied to simulate the guided mode profile at the wavelength of 1539 nm. The waveguide structures emerge as candidates for integrated photonic devices.

Citation Download Citation

Chun-Xiao Liu, Li-Li Fu, Rui-Lin Zheng, Hai-Tao Guo, Zhi-Guang Zhou, Wei-Nan Li, She-Bao Lin, and Wei Wei "Optical waveguides fabricated by nitrogen ion implantation in fused silica," Optical Engineering 55(2), 027105 (18 February 2016). https://doi.org/10.1117/1.OE.55.2.027105

Published: 18 February 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE