Open Access
8 May 2015 Quantitative measurement of CO2 laser-induced residual stress in fused silica optics
Liang Yang, Wei Liao, Xinxiang Miao, Xiaodong Yuan, Wanguo Zheng, Haibin Lv, Guorui Zhou, Xiaotao Zu, Xia Xiang
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Abstract
The residual stress field of fused silica induced by continuous wave CO2 laser irradiation is investigated with specific photoelastic methods. Both hoop stress and axial stress in the irradiated zone are measured quantitatively. For the hoop stress along the radial direction, the maximum phase retardance of 30 nm appears at the boundary of the laser distorted zone (680-μm distance to center), and the phase retardance decreases rapidly and linearly inward, and decreases slowly and exponentially outward. For the axial stress, tensile stress lies in a thin surface layer (<280  μm) and compressive stress lies just below the tensile region. Both tensile and compressive stresses increase first and then decrease along the depth direction. The maximum phase retardance induced by axial tensile stress is 150 nm, and the maximum phase retardance caused by axial compression stress is about 75 nm. In addition, the relationship between the maximum axial stress and the deformation height of the laser irradiated zone is also discussed.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Liang Yang, Wei Liao, Xinxiang Miao, Xiaodong Yuan, Wanguo Zheng, Haibin Lv, Guorui Zhou, Xiaotao Zu, and Xia Xiang "Quantitative measurement of CO2 laser-induced residual stress in fused silica optics," Optical Engineering 54(5), 057105 (8 May 2015). https://doi.org/10.1117/1.OE.54.5.057105
Published: 8 May 2015
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Gas lasers

Carbon monoxide

Silica

Laser irradiation

Laser processing

Carbon dioxide lasers

Glasses

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