Influence of material removal programming on ion beam figuring of high-precision optical surfaces

Wenlin Liao; Yifan Dai; Xuhui Xie

doi:10.1117/1.OE.53.9.095101

4 September 2014 Influence of material removal programming on ion beam figuring of high-precision optical surfaces

Wenlin Liao, Yifan Dai, Xuhui Xie

Author Affiliations +

Optical Engineering, Vol. 53, Issue 9, 095101 (September 2014). https://doi.org/10.1117/1.OE.53.9.095101

Abstract

Ion beam figuring (IBF) provides a nanometer/subnanometer precision fabrication technology for optical components, where the surface materials on highlands are gradually removed by the physical sputtering effect. In this deterministic method, the figuring process is usually divided into several iterations and the sum of the removed material in each iteration is expected to approach the ideally removed material as nearly as possible. However, we find that the material removal programming in each iteration would influence the surface error convergence of the figuring process. The influence of material removal programming on the surface error evolution is investigated through the comparative study of the contour removal method (CRM) and the geometric proportion removal method (PRM). The research results indicate that the PRM can maintenance the smoothness of the surface topography during the whole figuring process, which would benefit the stable operation of the machine tool and avoid the production of mid-to-high spatial frequency surface errors. Additionally, the CRM only has the corrective effect on the area above the contour line in each iteration, which would result in the nonuniform convergence of the surface errors in various areas. All these advantages distinguish PRM as an appropriate material removal method for ultraprecision optical surfaces.

Citation Download Citation

Wenlin Liao, Yifan Dai, and Xuhui Xie "Influence of material removal programming on ion beam figuring of high-precision optical surfaces," Optical Engineering 53(9), 095101 (4 September 2014). https://doi.org/10.1117/1.OE.53.9.095101

Published: 4 September 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available