Flat-top distribution of excimer laser using ultrasonic grating

Liang Lei; Xin Liu; Xiaobo Xing; Qu Wang

doi:10.1117/1.OE.53.6.065102

3 June 2014 Flat-top distribution of excimer laser using ultrasonic grating

Liang Lei, Xin Liu, Xiaobo Xing, Qu Wang

Author Affiliations +

Optical Engineering, Vol. 53, Issue 6, 065102 (June 2014). https://doi.org/10.1117/1.OE.53.6.065102

Abstract

A model to achieve flat-top distribution of ultraviolet (UV) excimer laser is presented. Reserving the practically lossless superiority in the traditional diffraction approach, the method improves a diffraction grating with a controllable grating period based on the acousto-optic diffraction effect. A theoretical analysis extending the Huygens–Fresnel principle and Gauss Schell model describing a typically partial coherent source of excimer is proposed, so that a fast Fourier transform numerical simulation could be utilized to calculate the optimized Raman–Nath comprehensive parameter of the acousto-optic medium. Such an excimer homogenous technology could be wisely used in UV lithography and micromachining.

Citation Download Citation

Liang Lei, Xin Liu, Xiaobo Xing, and Qu Wang "Flat-top distribution of excimer laser using ultrasonic grating," Optical Engineering 53(6), 065102 (3 June 2014). https://doi.org/10.1117/1.OE.53.6.065102

Published: 3 June 2014

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