Improvement of magnetorheological finishing surface quality by nanoparticle jet polishing

Wenqiang Peng; Shengyi Li; Chaoliang Guan; Xinmin Shen; Yifan Dai; Zhuo Wang

doi:10.1117/1.OE.52.4.043401

15 April 2013 Improvement of magnetorheological finishing surface quality by nanoparticle jet polishing

Wenqiang Peng, Shengyi Li, Chaoliang Guan, Xinmin Shen, Yifan Dai, Zhuo Wang

Author Affiliations +

Optical Engineering, Vol. 52, Issue 4, 043401 (April 2013). https://doi.org/10.1117/1.OE.52.4.043401

Abstract

Nanoparticle jet polishing (NJP) is presented as a posttreatment to remove magnetorheological finishing (MRF) marks. In the NJP process the material is removed by chemical impact reaction, and the material removal rate of convex part is larger than that of the concave part. Smoothing thus can progress automatically in the NJP process. In the experiment, a silica glass sample polished by MRF was polished by NJP. Experiment results showed the MRF marks were removed clearly. The uniform polishing process shows that the NJP process can remove the MRF marks without destroying the original surface figure. The surface root-mean-square roughness is improved from 0.72 to 0.41 nm. power spectral density analysis indicates the surface quality is improved, and the experimental result validates effective removal of MRF marks by NJP.

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Wenqiang Peng, Shengyi Li, Chaoliang Guan, Xinmin Shen, Yifan Dai, and Zhuo Wang "Improvement of magnetorheological finishing surface quality by nanoparticle jet polishing," Optical Engineering 52(4), 043401 (15 April 2013). https://doi.org/10.1117/1.OE.52.4.043401

Published: 15 April 2013

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