Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect

Hiroyuki Nikkuni; Yu Watanabe; Masashi Ohkawa; Takashi Sato

doi:10.1117/1.2909669

1 April 2008 Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect

Hiroyuki Nikkuni, Yu Watanabe, Masashi Ohkawa, Takashi Sato

Author Affiliations +

Optical Engineering, Vol. 47, Issue 4, 044402 (April 2008). https://doi.org/10.1117/1.2909669

Abstract

We experimentally investigated the relationship between sensitivity and diaphragm thickness in a glass-based guided-wave optical pressure sensor using intermodal interference between the fundamental TM-like and TE-like modes. The sensor consists of a rectangular diaphragm and a straight single-mode waveguide on the diaphragm. The sensitivity is theoretically known to be inversely proportional to the square of the diaphragm thickness. In this study, to examine this relationship, four sensors with diaphragm thicknesses of 0.30 mm, 0.22 mm, 0.20 mm, and 0.15 mm were fabricated. The area of the diaphragm was 10 mm×10 mm. For the waveguide position nearest to the center of the diaphragm, the measured sensitivities almost agreed with the theoretical ones.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Hiroyuki Nikkuni, Yu Watanabe, Masashi Ohkawa, and Takashi Sato "Sensitivity dependence with respect to diaphragm thickness in guided-wave optical pressure sensor based on elasto-optic effect," Optical Engineering 47(4), 044402 (1 April 2008). https://doi.org/10.1117/1.2909669

Published: 1 April 2008

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