Influence of deposition temperature on the properties of high-reflectivity coatings

Meiqiong Zhan; Tianya Tan; Dawei Zhang; Hongbo He; Jianda Shao; Zhengxiu Fan

doi:10.1117/1.2211647

1 June 2006 Influence of deposition temperature on the properties of high-reflectivity coatings

Meiqiong Zhan, Tianya Tan, Dawei Zhang, Hongbo He, Jianda Shao, Zhengxiu Fan

Author Affiliations +

Optical Engineering, Vol. 45, Issue 6, 063801 (June 2006). https://doi.org/10.1117/1.2211647

Abstract

The effect of deposition temperature on the properties of 355-nm high-reflectivity (HR) coatings was investigated. A series of 355-nm HR coatings were deposited by electron-beam evaporation using the same deposition process, but different deposition temperatures: 200, 250, 280, and 320 °C. Transmittance and high reflectance of the samples were measured with a Lambda 900 spectrometer, and the highest reflectance, 98.7%, was achieved at a deposition temperature of 280 °C. The laser-induced damage threshold (LIDT) was measured with a 355-nm pulsed laser with a pulse width of 8 ns. It was found that the deposition temperature had a significant effect on the LIDT of coatings. LIDTs up to 18.5 J/cm² were achieved when the deposition temperature was 280 °C. The LIDT of the coating deposited at 280 °C is about three times greater than that of coatings deposited at the other temperatures. Damage morphologies of samples at different deposition temperatures were observed with a Leica-DMRXE microscope. Microstructures of the samples were characterized by x-ray diffraction (XRD). An absorptance-dominated model is proposed, which agrees very well with the damage threshold results.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Meiqiong Zhan, Tianya Tan, Dawei Zhang, Hongbo He, Jianda Shao, and Zhengxiu Fan "Influence of deposition temperature on the properties of high-reflectivity coatings," Optical Engineering 45(6), 063801 (1 June 2006). https://doi.org/10.1117/1.2211647

Published: 1 June 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available