Silicon wafer thickness variation measurements using the National Institute of Standards and Technology infrared interferometer

Tony L. Schmitz; Angela D. Davies; Chris Evans; Robert E. Parks

doi:10.1117/1.1589757

1 August 2003 Silicon wafer thickness variation measurements using the National Institute of Standards and Technology infrared interferometer

Tony L. Schmitz, Angela D. Davies, Chris Evans, Robert E. Parks

Author Affiliations +

Optical Engineering, Vol. 42, Issue 8, (August 2003). https://doi.org/10.1117/1.1589757

Decreasing depths of focus, coupled with increasing silicon wafer diameters, place greater restrictions on chucked wafer flatness in photolithography processes. A measurement device is described that measures thickness variation of double-sided polished wafers using an IR source and vidicon detector. Various possible instrument configurations are described with the focus on a setup that uses a collimated wavefront to produce interference fringes between the front and back surfaces of the plane parallel wafer. Experimental results are presented. These tests include (1) a drift test; (2) comparisons between measurements performed using different collimators and, subsequently, wavefronts; (3) an exploration of the impact of phase change on reflection due to the wafer clamping method; and (4) an intercomparison with thickness measurements recorded by a capacitance gage-based instrument and surface measurements obtained using a separate visible wavelength interferometer.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Tony L. Schmitz, Angela D. Davies, Chris Evans, and Robert E. Parks "Silicon wafer thickness variation measurements using the National Institute of Standards and Technology infrared interferometer," Optical Engineering 42(8), (1 August 2003). https://doi.org/10.1117/1.1589757

Published: 1 August 2003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available