Investigation of common-path interference profilometry

Weidong Zhou; Zhaofei Zhou; Guichun Chi

doi:10.1117/1.601555

1 November 1997 Investigation of common-path interference profilometry

Weidong Zhou, Zhaofei Zhou, Guichun Chi

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Optical Engineering, Vol. 36, Issue 11, (November 1997). https://doi.org/10.1117/1.601555

The principle of laser common-path interference profilometry based on the theory of Gaussian beams is analyzed and its measurement equation is deduced. From the measurement equation, the main factors that affect the vertical resolution of the profilometer are discussed. According to the conclusions of the analysis, laser common-path interference profilometry can be used to measure microprofiles of fine surfaces with subnanometer vertical resolution.

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Weidong Zhou, Zhaofei Zhou, and Guichun Chi "Investigation of common-path interference profilometry," Optical Engineering 36(11), (1 November 1997). https://doi.org/10.1117/1.601555

Published: 1 November 1997

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