Sensitivity-variable moire topography with a phase shift method

Tetsuya Matsumoto; Yoichi Kitagawa; Takumi Minemoto

doi:10.1117/1.600759

1 June 1996 Sensitivity-variable moire topography with a phase shift method

Tetsuya Matsumoto, Yoichi Kitagawa, Takumi Minemoto

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Optical Engineering, Vol. 35, Issue 6, (June 1996). https://doi.org/10.1117/1.600759

We propose a projection moire´ topography with a phase shift method for measuring the fine profile of an object. In this method, a set of interference fringes made using a Mach-Zehnder interferometer and a dove prism is projected on an object surface to generate moire´ fringes. The interval between the moire´ fringes can be easily changed in a range of 160 to 300 µm and we can realize sensitivity-variable moire´ contouring. Also, the phases of the moire´ -fringe pattern are easily changed by shifting one of the interference fringe patterns and the depth at each point on the object are computed with a high accuracy from the several moire´ -fringe patterns with different phases. Although the interferometer is used in the system, the setup is robust against vibrations.

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Tetsuya Matsumoto, Yoichi Kitagawa, and Takumi Minemoto "Sensitivity-variable moire topography with a phase shift method," Optical Engineering 35(6), (1 June 1996). https://doi.org/10.1117/1.600759

Published: 1 June 1996

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