Monitoring surface roughness by means of doubly scattered image speckle

Takeaki Yoshimura; Eiichi Miyazaki; Kunifumi Nakanishi

doi:10.1117/12.135846

1 June 1993 Monitoring surface roughness by means of doubly scattered image speckle

Takeaki Yoshimura, Eiichi Miyazaki, Kunifumi Nakanishi

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Optical Engineering, Vol. 32, Issue 6, (June 1993). https://doi.org/10.1117/12.135846

Abstract

A new method to measure the surface roughness under fully developed speckle pattern illumination is proposed. This technique was developed on the basis that the roughness depends on the speckle size of doubly scattered light and that the speckle size can be determined from the second-order moment of integrated intensity over a finite area of the photodetector used. This system can determine the longitudinal roughness or the average slope of the surface profile on-line, and determine the spatial distribution of the roughness without a mechanical scanning system.

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Takeaki Yoshimura, Eiichi Miyazaki, and Kunifumi Nakanishi "Monitoring surface roughness by means of doubly scattered image speckle," Optical Engineering 32(6), (1 June 1993). https://doi.org/10.1117/12.135846

Published: 1 June 1993

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