A Non-Contacting Length Comparator with 10 Nanometer Precision

A. W. Hartman; F. W. Rosberry; J. Arol Simpson

doi:10.1117/12.7971639

1 June 1973 A Non-Contacting Length Comparator with 10 Nanometer Precision

A. W. Hartman, F. W. Rosberry, J. Arol Simpson

Author Affiliations +

Optical Engineering, Vol. 12, Issue 3, 120395 (June 1973). https://doi.org/10.1117/12.7971639

Abstract

A non-contacting length comparator utilizing two specially designed photo-electric micro-scopes has been constructed. Performance tests of this comparator, using lapped and polished steel surfaces demonstrate a resolution of -1 nanometer, a precision of--10 nanometers, and a linear range in excess of 50 micrometers.

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A. W. Hartman, F. W. Rosberry, and J. Arol Simpson "A Non-Contacting Length Comparator with 10 Nanometer Precision," Optical Engineering 12(3), 120395 (1 June 1973). https://doi.org/10.1117/12.7971639

Published: 1 June 1973

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