Open Access
23 March 2022 Evaluation of robustness against external vibrations for long-range MEMS lidar with one-dimensional resonant micromirror
Han Woong Yoo, David Brunner, Matthias Macho, Leonhard Niedermueller, Angel Jurado Devesa, Leonhard Kormann, Georg Schitter
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Abstract

We describe the verification of a long-range one-dimensional (1D) scanning micro-electro-mechanical systems (MEMS) lidar specifically considering the robustness against external vibration influences. The 1D scanning MEMS lidar exploits a multichannel horizontal line laser to scan the scene vertically for a 10  deg  ×  11  deg horizontal and vertical field of view at a frame rate of up to 29 Hz. To evaluate the robustness against vibrations, a vibration evaluation setup is developed to apply a wideband vibration based on the automotive standard LV124. The vibration tests are performed in three conditions open loop without control and two phase-locked loops (PLLs) with default and high gain settings. The test results demonstrate that vibration can cause wobbly distortion along the scan angle in the open loop case and the PLLs can suppress effectively this influence in the mean and standard deviation of the standard point to surface error up to 69.3% and 90.0%, respectively. This verifies the benefits of the MEMS mirror control, ensuring stable point cloud measurements under vibrations in harsh automotive environments.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Han Woong Yoo, David Brunner, Matthias Macho, Leonhard Niedermueller, Angel Jurado Devesa, Leonhard Kormann, and Georg Schitter "Evaluation of robustness against external vibrations for long-range MEMS lidar with one-dimensional resonant micromirror," Journal of Optical Microsystems 2(1), 011007 (23 March 2022). https://doi.org/10.1117/1.JOM.2.1.011007
Received: 22 November 2021; Accepted: 1 March 2022; Published: 23 March 2022
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CITATIONS
Cited by 1 scholarly publication and 1 patent.
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KEYWORDS
Microelectromechanical systems

LIDAR

Mirrors

Clouds

Receivers

Transmitters

Field programmable gate arrays

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