Low-stress phase plates produced by serial bideposition of TiO2 thin films

Tomas Tolenis; Lina Grinevičiūtė; Lina Mažulė; Algirdas Selskis; Ramutis Drazdys

doi:10.1117/1.JNP.10.036003

19 July 2016 Low-stress phase plates produced by serial bideposition of TiO₂thin films

Tomas Tolenis, Lina Grinevičiūtė, Lina Mažulė, Algirdas Selskis, Ramutis Drazdys

Author Affiliations +

Journal of Nanophotonics, Vol. 10, Issue 3, 036003 (July 2016). https://doi.org/10.1117/1.JNP.10.036003

Abstract

The stresses in thin films are one of the main problems in the development of small dimensions or thin optical components. In order to produce low-tension anisotropic coatings, the characterization of serial bideposition is essential. Structural and optical performance have been tested for anisotropic TiO₂thin films deposited by serial bideposition technique. Three-dimensional surface interferometric measurements were performed for samples deposited at various angles. Also experimental observations of anisotropic tensions in annealed two-dimensional sculptured thin films of TiO₂ material are presented. The deposition angle of 80 deg is considered to be the most applicable for developing optical components due to the befitting optical performance and the lowest tensions before and after the annealing.

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Tomas Tolenis, Lina Grinevičiūtė, Lina Mažulė, Algirdas Selskis, and Ramutis Drazdys "Low-stress phase plates produced by serial bideposition of TiO₂thin films," Journal of Nanophotonics 10(3), 036003 (19 July 2016). https://doi.org/10.1117/1.JNP.10.036003

Published: 19 July 2016

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