MOEMS-based lithography for the fabrication of micro-optical components

Lars Erdmann; Arnaud Deparnay; Gunter Maschke; Mario Längle; Robert Brunner

doi:10.1117/1.2114647

1 October 2005 MOEMS-based lithography for the fabrication of micro-optical components

Lars Erdmann, Arnaud Deparnay, Gunter Maschke, Mario Längle, Robert Brunner

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041601 (October 2005). https://doi.org/10.1117/1.2114647

Abstract

We present a new method for the fabrication of diffractive and refractive micro-optical components. The method is suitable for high-quality rapid prototyping of optical components and allows the fast experimental test of designs for computer-generated holograms or refractive microstructures. Our method is based on employing a digital-multimirror device (DMD) as a switchable projection mask. The DMD is imaged into a photoresist layer using a Carl Zeiss lithography objective with a demagnification of 10:1 and a numerical aperture of 0.32 on the image side. The resulting pixel size is 1.368×1.368 µm. In comparison with laser direct writing with a single spot, our method is a parallel processing of nearly 800,000 pixels (1024×768 pixels). This fabrication method can be applied to all MOEMS components. The method adds a new dimension in MOEMS processing, reducing the fabrication complexity, and improves the flexibility of process simulation and design.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Lars Erdmann, Arnaud Deparnay, Gunter Maschke, Mario Längle, and Robert Brunner "MOEMS-based lithography for the fabrication of micro-optical components," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041601 (1 October 2005). https://doi.org/10.1117/1.2114647

Published: 1 October 2005

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available