Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications

Hargsoon Yoon; Vijay K. Varadan

doi:10.1117/1.1759331

1 July 2004 Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications

Hargsoon Yoon, Vijay K. Varadan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 3, (July 2004). https://doi.org/10.1117/1.1759331

Abstract

A new design of a bilateral interdigital coplanar waveguide (BI-CPW) phase shifter using tunable barium strontium titanate thin film is presented and analyzed. This new design has shown a phase shift of 203°/cm at 25 GHz. Compared to a normal coplanar waveguide (CPW) type, a two-thirds size BI-CPW phase shifter is realized by interdigital capacitive loading. The phase shifter is fabricated with processes fully compatible with current SiGe technology. In addition, it is shown that operating voltages can be reduced significantly within a practical range by the inclusion of a polysilicon layer as a control electrode.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Hargsoon Yoon and Vijay K. Varadan "Design and performance of bilateral interdigital coplanar waveguide phase shifter for rf communication applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(3), (1 July 2004). https://doi.org/10.1117/1.1759331

Published: 1 July 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available