Three-dimensional point-spread function and depth-of-focus formulas in projection lithography

Anthony Yen

doi:10.1117/1.JMM.21.4.040501

27 October 2022 Three-dimensional point-spread function and depth-of-focus formulas in projection lithography

Anthony Yen

Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 21, Issue 4, 040501 (October 2022). https://doi.org/10.1117/1.JMM.21.4.040501

Abstract

Resolution and depth-of-focus (DOF) formulas in projection imaging are reviewed with the help of the three-dimensional point-spread function (3D PSF). The Debye integral is rigorously evaluated for the non-paraxial situation to give a closed-form expression for the axial 3D PSF from which the validity of DOF formula k₃λ / sin² ( θ / 2 ) is confirmed.

Citation Download Citation

Anthony Yen "Three-dimensional point-spread function and depth-of-focus formulas in projection lithography," Journal of Micro/Nanopatterning, Materials, and Metrology 21(4), 040501 (27 October 2022). https://doi.org/10.1117/1.JMM.21.4.040501

Received: 5 August 2022; Accepted: 11 October 2022; Published: 27 October 2022

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