Predicting overlay performance for electron-projection-lithography masks

Phillip L. Reu; Cheng-Fu Chen; Roxann L. Engelstad; Edward G. Lovell; Michael J. Lercel; Obert R. Wood II; R. Scott Mackay

doi:10.1117/1.1563646

1 April 2003 Predicting overlay performance for electron projection lithography masks

Phillip L. Reu, Cheng-Fu Chen, Roxann L. Engelstad, Edward G. Lovell, Michael J. Lercel, Obert R. Wood II, R. Scott Mackay

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 2, (April 2003). https://doi.org/10.1117/1.1563646

Abstract

Minimizing mask-level distortions is critical to the success of electron projection lithography (EPL) in the sub-100-nm regime. A number of possibilities exist to reduce mask-fabrication and pattern-transfer distortion including subfield correction, "dummy" patterns, pattern splitting, and film stress control. Finite element modeling was used to illustrate the advantages and capabilities of these correction schemes for a 100-mm stencil mask with 1-mm×1-mm membrane windows. Static-random-access-memory-type circuit features, including both the interconnect and contact levels, were used, to simulate realistic circuit layouts with both cross-mask and intra-membrane pattern density gradients. With such correction techniques, it is possible to reduce the EPL mask-level distortions for "worst-case" mixed pattern types to less than 1.0 nm.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Phillip L. Reu, Cheng-Fu Chen, Roxann L. Engelstad, Edward G. Lovell, Michael J. Lercel, Obert R. Wood II, and R. Scott Mackay "Predicting overlay performance for electron projection lithography masks," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(2), (1 April 2003). https://doi.org/10.1117/1.1563646

Published: 1 April 2003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE