Integrated blue-sensitive polarization-dependent photodetector

Jinkui Chu; Zhiwen Wang; Yingjie Zhang; Ze Liu; Yinlong Wang

doi:10.1117/1.JMM.12.3.033005

11 July 2013 Integrated blue-sensitive polarization-dependent photodetector

Jinkui Chu, Zhiwen Wang, Yingjie Zhang, Ze Liu, Yinlong Wang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 3, 033005 (July 2013). https://doi.org/10.1117/1.JMM.12.3.033005

Abstract

Multioriented bilayer nanowire polarizers are integrated with photodetectors using only one-time nanoimprint lithography and metal deposition process. In order to keep the position of peak external quantum efficiency of the photodetector unchanged, the bilayer nanowire polarizer is designed to have the highest transmission at 440 nm. The photodetector is integrated with the polarizer after surface treatment. The performance of the fabricated device is then tested, and three characteristics are realized: light-intensity sensitive, polarization sensitive, and blue-light sensitive. The proposed integration method simplified the fabrication process, and the fabricated device avoids the alignment error which would be produced by using discrete elements. The results demonstrate that the proposed integration process is a promising method for fabricating photodetectors with polarization function.

Citation Download Citation

Jinkui Chu, Zhiwen Wang, Yingjie Zhang, Ze Liu, and Yinlong Wang "Integrated blue-sensitive polarization-dependent photodetector," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(3), 033005 (11 July 2013). https://doi.org/10.1117/1.JMM.12.3.033005

Published: 11 July 2013

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