Efficient magnetic microactuator with an enclosed magnetic core

Chun-Hsu Ko; J. J. Yang; J.C. Chiou

doi:10.1117/1.1484161

1 July 2002 Efficient magnetic microactuator with an enclosed magnetic core

Chun-Hsu Ko, J. J. Yang, J.C. Chiou

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 1, Issue 2, (July 2002). https://doi.org/10.1117/1.1484161

Abstract

An efficient spiral-type magnetic microactuator design, composed of an enclosed core and a magnetic plate, is presented to produce a high magnetic flux density, a large force, and a large displacement. The design allows a large variation in area of the Permalloy plate and then the area of the poles can optimally enlarge with the fixed area of the Permalloy plate. Verification by the magnetic path analysis and the finite element method yields a theoretical actuator design for the magnetic microactuator. An integrated magnetic microactuator is fabricated and tested to demonstrate the capability of the improved design. The microactuator consists of an electromagnet and a four-suspended-beam structure, bound together with a 28-μm-thick spacer between them. A series of experiments determines that the measured stiffness of the four-beam structure is approximately 45 μN/μm. Notably, the Permalloy plate on the four-suspended-beam structure is moved by 27.6 μm at a current and voltage of 292 mA and 4.5 V, respectively. The estimated force produced by the microactuator is around 1240 μN. These results show the microactuator with an enclosed core is efficient in producing magnetic force and has flexibility in application.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chun-Hsu Ko, J. J. Yang, and J.C. Chiou "Efficient magnetic microactuator with an enclosed magnetic core," Journal of Micro/Nanolithography, MEMS, and MOEMS 1(2), (1 July 2002). https://doi.org/10.1117/1.1484161

Published: 1 July 2002

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available