PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
Burn Jeng Lin
"E-Beam Direct-Write Lithography/Nanoimprint Lithography and Aviation," Journal of Micro/Nanolithography, MEMS, and MOEMS 6(1), 010101 (1 January 2007). https://doi.org/10.1117/1.2718964