Electrostatically tunable MOEMS waveguide Bragg grating-based DWDM optical filter

Poorna Lakshmi Uppalapati; Balasubramanian Malayappan; Narayan Krishnaswamy; Prasant Kumar Pattnaik

doi:10.1117/1.JMM.18.1.015503

21 February 2019 Electrostatically tunable MOEMS waveguide Bragg grating-based DWDM optical filter

Poorna Lakshmi Uppalapati, Balasubramanian Malayappan, Narayan Krishnaswamy, Prasant Kumar Pattnaik

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 18, Issue 1, 015503 (February 2019). https://doi.org/10.1117/1.JMM.18.1.015503

Abstract

An electrostatically actuated MEMS cantilever beam-based waveguide Bragg grating tunable optical filter has been designed and simulated. The tunable filter is obtained by shifting the reflected wavelength of the waveguide Bragg grating located on the electrostatically actuated cantilever beam. An approach to increasing the electrostatic actuation of the beam by having an electrode underneath the beam is used and a large wavelength tuning range for the optical filter is achieved. Dimensions of the device are chosen such that full-width-half-maximum is 0.75 nm, thus capable of filtering adjacent channels of the dense wavelength division multiplexing (DWDM) network. The filter has a tuning range of 10.65 nm (1552.52 to 1563.17 nm) providing add/drop functionality for 14 adjacent DWDM channels.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Poorna Lakshmi Uppalapati, Balasubramanian Malayappan, Narayan Krishnaswamy, and Prasant Kumar Pattnaik "Electrostatically tunable MOEMS waveguide Bragg grating-based DWDM optical filter," Journal of Micro/Nanolithography, MEMS, and MOEMS 18(1), 015503 (21 February 2019). https://doi.org/10.1117/1.JMM.18.1.015503

Received: 24 August 2018; Accepted: 25 January 2019; Published: 21 February 2019

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KEYWORDS

Waveguides

Dense wavelength division multiplexing

Optical filters

Microelectromechanical systems

Microopto electromechanical systems

Bragg gratings

Silicon

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