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26 November 2013 Design and wafer-level replication of a freeform curvature for polymer-based electrostatic out-of-plane actuators
Nicolas Lange, Sebastian Scheiding, Frank C. Wippermann, Erik Beckert, Ramona Eberhardt, Andreas Tünnermann
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 4, 041205 (November 2013). https://doi.org/10.1117/1.JMM.12.4.041205
Abstract
The purpose of this paper is the fabrication, replication, and wafer-level imprinting of a polynomial curvature to enable the realization of an electrostatic out-of-plane zipper actuator with considerably altered and enhanced voltage versus deflection behavior. This is achievable only by changing silicon as established main material to a UV-curable polymer, while retaining the lithography-based fabrication technology. The basic concept of this actuator is explained, and with derived design rules, a finite element analysis is established to design an actuator with an integrated micro-mirror and 10-μm deflection at 60-V driving voltage. The diamond turning of the master mold and the wafer-level fabrication process of the polynomial curvature are explained in detail and realized by unconventional wafer-level imprinting of a UV-curable, nonconducting polymer. The experimental results of the deflection measurements show a deflection of the intended 10 μm at 200 V. This deviation in necessary driving voltage can be explained by fabrication-induced intrinsic stresses, which bend the actuator beams upward. This increases the gap between the electrodes, making it possible to achieve 26-μm deflection at 300 V. This paper finalizes with an illustration about the now possible designs for polymer-based electrostatic zipper actuators.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Nicolas Lange, Sebastian Scheiding, Frank C. Wippermann, Erik Beckert, Ramona Eberhardt, and Andreas Tünnermann "Design and wafer-level replication of a freeform curvature for polymer-based electrostatic out-of-plane actuators," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(4), 041205 (26 November 2013). https://doi.org/10.1117/1.JMM.12.4.041205
Published: 26 November 2013
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KEYWORDS
Actuators
Polymers
Silicon
Electrodes
Polymeric actuators
Semiconducting wafers
Finite element methods
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