Symmetry of spatial-dispersion-induced birefringence and its implications for CaF2 ultraviolet optics

John H. Burnett; Zachary H. Levine; Eric L. Shirley; John H. Bruning

doi:10.1117/1.1503350

1 October 2002 Symmetry of spatial-dispersion-induced birefringence and its implications for CaF₂ ultraviolet optics

John H. Burnett, Zachary H. Levine, Eric L. Shirley, John H. Bruning

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 1, Issue 3, (October 2002). https://doi.org/10.1117/1.1503350

Abstract

The discovery of a significant spatial-dispersion-induced birefringence (intrinsic birefringence) in CaF₂ at ultraviolet wavelengths has had a major impact on the design of 157 nm lithography systems, requiring complete redesign of the optics to take account of the imaging aberrations resulting from the birefringence and the accompanying index anisotropy. This intrinsic birefringence phenomena results from a symmetry-breaking effect of the finite wave vector of the photon on the symmetry of the light-matter interaction in fluorite-structure cubic crystals. As a follow-up to our original concise report of measurements and theory of the effect in CaF₂ and BaF₂, we present here a more detailed analysis of the theory, focusing on the symmetry and its consequences. We also provide the full directional dependence of the effect in useful closed forms. We analyze the implications for precision optical design with CaF₂ optical elements, and discuss qualitatively the approaches being considered to compensate for it.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

John H. Burnett, Zachary H. Levine, Eric L. Shirley, and John H. Bruning "Symmetry of spatial-dispersion-induced birefringence and its implications for CaF₂ ultraviolet optics," Journal of Micro/Nanolithography, MEMS, and MOEMS 1(3), (1 October 2002). https://doi.org/10.1117/1.1503350

Published: 1 October 2002

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