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Focus-based Optical Metrology
Book: Practical Optical Dimensional Metrology
Author(s): Kevin G. Harding
Published: 2019
https://doi.org/10.1117/3.2513685.ch4
Abstract
A method of optical metrology that has seen wide use in recent years employs focus changes in an optical system to provide a means of measurement. A simple form of this method is used in autofocus cameras.
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CHAPTER 4
 28 PAGES
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KEYWORDS
Confocal microscopy
Sensors
Colorimetry
Optical metrology
Microscopes
Imaging systems
Cameras
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