DNQ/Novolak Interactions

doi:10.1117/3.2265072.ch4

Book: Diazonaphthoquinone-based Resists

Author(s): Ralph R. Dammel

Published: 1993

https://doi.org/10.1117/3.2265072.ch4

Author Affiliations +

Abstract

The hydrophilic diffusion channel model as discussed in section 3.7 and 3.8 explains the known facts of novolak dissolution very nicely: the disproportionate response of the novolak dissolution rate to the addition of a small amount of DNQ is due to a blocking of the diffusion channels by the inhibitor. A small amount of inhibitor may thus cause a large reduction in dissolution rate by blocking some diffusion channels, and thus lowering their total number below some critical value. PHS with its much higher density of diffusion channels would therefore be practically impossible to inhibit, as is indeed observed.