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Image Formation in an Optical System
Book: Optical Physics for Nanolithography
Author(s): Shinn-Sheng Yu, Anthony Yen
Published: 2018
https://doi.org/10.1117/3.2314953.ch6
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Abstract
In this chapter, we describe the physics of image formation and the methods of computing aerial images formed by precision optical systems used in optical lithography. We begin this chapter by giving the reader an overview of the imaging process, from which the factors affecting the resolution limit of an optical system can be clearly seen.
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CHAPTER 6
 58 PAGES
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KEYWORDS
Imaging systems
Diffraction
Photomasks
Optical imaging
Polarization
Image acquisition
Semiconducting wafers
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