Physical-optics modeling and design of curved surfaces

Frank Wyrowski; Christian Hellmann

doi:10.1117/12.3023304

18 June 2024 Physical-optics modeling and design of curved surfaces

Frank Wyrowski, Christian Hellmann

Proceedings Volume PC13023, Computational Optics 2024; PC130230E (2024) https://doi.org/10.1117/12.3023304
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

The modeling of the propagation of light through curved smooth surfaces constitutes the backbone of optical system modeling. The Local Plane Interface Approximation (LPIA) has been suggested for this task and shows excellent accuracy and simulation speed. It assumes a local plane wave and a local plane interface and applies the S matrix solution for stratified media locally. As a physical-optics generalization of ray optics the LPIA technique has been formulated in the space domain. We show that it must be applied in the k-domain to genuinely include effects like the Goos Hänchen shift and, more importantly, lateral shifts due to transmission and reflection at smooth surfaces with coatings. Such shifts lead to small aberrations, which must be included in high-accuracy optical system modeling, e.g., in lithography.

Conference Presentation

Citation Download Citation

Frank Wyrowski and Christian Hellmann "Physical-optics modeling and design of curved surfaces", Proc. SPIE PC13023, Computational Optics 2024, PC130230E (18 June 2024); https://doi.org/10.1117/12.3023304

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available