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18 June 2024 Ultra-high dynamic broadband scatterometer for comprehensive characterization of optical interference coatings
Myriam Zerrad, Michel Lequime, Alexandra Carrez, Claude Amra
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Proceedings Volume PC13020, Advances in Optical Thin Films VIII; PC130200T (2024) https://doi.org/10.1117/12.3025131
Event: SPIE Optical Systems Design, 2024, Strasbourg, France
Abstract
This paper will present an overview of the recent progress made by the Institut Fresnel for the metrology of ultra-low optical fluxes. A focus will be dedicated to the development of a breakthrough instrument designed for a global analysis of complex optical coatings : a Spectrally and Angularly resolved Light Scattering characterization Apparatus (SALSA). A panel of applications will illustrate the capabilities of the instrument, such as measuring the optical responses of linearly variable filters or characterizing the scattering losses of very high performance optical coatings.
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© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Myriam Zerrad, Michel Lequime, Alexandra Carrez, and Claude Amra "Ultra-high dynamic broadband scatterometer for comprehensive characterization of optical interference coatings", Proc. SPIE PC13020, Advances in Optical Thin Films VIII, PC130200T (18 June 2024); https://doi.org/10.1117/12.3025131
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KEYWORDS
Optical coatings
Equipment
Light scattering
Linear filtering
Metrology
Optical filters
Optical testing
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