Modeling of the EUV emission and radiative transfer from tin to rare-earth elements in laser-produced plasmas

Akira Sasaki

doi:10.1117/12.3010081

10 April 2024 Modeling of the EUV emission and radiative transfer from tin to rare-earth elements in laser-produced plasmas

Akira Sasaki

Author Affiliations +

Proceedings Volume PC12953, Optical and EUV Nanolithography XXXVII; PC129530W (2024) https://doi.org/10.1117/12.3010081
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

Strong emission at the wavelength of 13.5 nm is obtained from laser-produced tin plasmas. Emission in shorter wavelengths in the 6 - 7 nm band can be obtained using gadolinium and terbium plasmas. The emission mainly arises from atomic 4d-4f and 4p-4d unresolved transition array (UTA). The emission spectrum from YAG laser-pumped plasmas shows a broad tail on the longer wavelength side, which is attributed to emission from multiple excited states. We calculate the emission spectrum based on the computational atomic data to investigate the condition to obtain high power with high spectral purity.

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Akira Sasaki "Modeling of the EUV emission and radiative transfer from tin to rare-earth elements in laser-produced plasmas", Proc. SPIE PC12953, Optical and EUV Nanolithography XXXVII, PC129530W (10 April 2024); https://doi.org/10.1117/12.3010081

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