Comparative study of dielectrics cutting with Bessel beam using refractive and reflective axicons

Ivan Gusachenko; Pierre Balage; Gwenn Pallier; Guillaume Bonamis; Clemens Hönninger; John Lopez; Inka Manek-Hönninger

doi:10.1117/12.3004466

13 March 2024 Comparative study of dielectrics cutting with Bessel beam using refractive and reflective axicons

Ivan Gusachenko, Pierre Balage, Gwenn Pallier, Guillaume Bonamis, Clemens Hönninger, John Lopez, Inka Manek-Hönninger

Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC1287204 (2024) https://doi.org/10.1117/12.3004466
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

Dielectrics cutting with Bessel beams formed by an axicon is nowadays a well-known technique. Typically, the axicon is used in transmission to form the elongated Bessel beam. In this contribution, we report on dielectrics cutting with a femtosecond laser using a reflective axicon and compare the results in terms of surface roughness of the cutting planes with those obtained with a standard refractive axicon. Moreover, we couple the spatial beam shaping with temporal beam shaping applying MHz- and GHz-bursts of femtosecond pluses.

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Citation Download Citation

Ivan Gusachenko, Pierre Balage, Gwenn Pallier, Guillaume Bonamis, Clemens Hönninger, John Lopez, and Inka Manek-Hönninger "Comparative study of dielectrics cutting with Bessel beam using refractive and reflective axicons", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287204 (13 March 2024); https://doi.org/10.1117/12.3004466

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