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13 March 2024 Vertically standing nano-pillars by ultrafast first-order Bessel beam
Valeria Belloni, Mostafa Hassan, Anne-Magali Seydoux-Guillaume, Sergio Sao-Joao, Luca Furfaro, Remo Giust, Francois Courvoisier
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Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC1287202 (2024) https://doi.org/10.1117/12.3000862
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
The invariant longitudinal spatial profile of the Bessel beam makes it attractive for laser processing. We show a fast and simple process to generate high aspect ratio nano-pillars using a single ultrafast pulse shaped as higher order Bessel beam. The high pressure induced in the sapphire bulk results in the ejection of elongated structures. These nano-pillars can exceed 15 μm in height with a sub-μm diameter. The observed morphologies suggest a model with different material ejection processes, ranging from solid material extraction to hydrodynamic jets. High-resolution transmission electron microscopy of the crystalline structure provides support for our proposed model.
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Valeria Belloni, Mostafa Hassan, Anne-Magali Seydoux-Guillaume, Sergio Sao-Joao, Luca Furfaro, Remo Giust, and Francois Courvoisier "Vertically standing nano-pillars by ultrafast first-order Bessel beam", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287202 (13 March 2024); https://doi.org/10.1117/12.3000862
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KEYWORDS
Bessel beams
Ultrafast phenomena
Sapphire
Solids
Ultrafast lasers
Laser irradiation
Laser nanostructuring
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