Aberration corrected reflection tomography for ultra-high resolution and versatile reflection measurement

Herve J. Hugonnet; Park YongKeun

doi:10.1117/12.3001232

13 March 2024 Aberration corrected reflection tomography for ultra-high resolution and versatile reflection measurement

Herve J. Hugonnet, Park YongKeun

Proceedings Volume PC12852, Quantitative Phase Imaging X; PC1285209 (2024) https://doi.org/10.1117/12.3001232
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

We propose a novel approach for reflective measurements using utilizes high temporal coherence and low spatial coherence illumination in a full-field reflective geometry. This allows the reference plane to be shifted to the camera, eliminating the need for meticulous alignment and enabling the use of a single high numerical aperture (NA) objective lens. To enhance the quality of our measurements, we perform deconvolution and digital aberration correction on the measured data. We achieve a resolution close to the theoretical limit of our system: 100nm-100nm-500nm and demonstrate the unique capabilities of our experimental setup on both biological and industrial samples.

Conference Presentation

Citation Download Citation

Herve J. Hugonnet and Park YongKeun "Aberration corrected reflection tomography for ultra-high resolution and versatile reflection measurement", Proc. SPIE PC12852, Quantitative Phase Imaging X, PC1285209 (13 March 2024); https://doi.org/10.1117/12.3001232

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