Atomic layer deposition of gradient-index anti-reflective coatings: eliminating the performance limitations of traditional optical coatings

John-Olof Rönn; Leevi Pesonen; Mikael Saarniheimo; Sami Sneck; Kalle Niiranen

doi:10.1117/12.2688606

30 November 2023 Atomic layer deposition of gradient-index anti-reflective coatings: eliminating the performance limitations of traditional optical coatings

John-Olof Rönn, Leevi Pesonen, Mikael Saarniheimo, Sami Sneck, Kalle Niiranen

Author Affiliations +

Proceedings Volume PC12778, Optifab 2023; PC127780G (2023) https://doi.org/10.1117/12.2688606
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

We present gradient-index optical coating technology and show that anti-reflective coatings with extremely low reflectance (< 0.2%) over wide bandwidth (400-1050 nm) can be deposited at low-temperature (≤ 100°C) with a total coating thickness of < 150 nm in large-scale (> 6 m2) batch configuration. In addition, we demonstrate that this optical performance can be maintained at angles of incidence up to 50°, a performance that cannot be matched with traditional optical coatings utilized in the optics industry.

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Citation Download Citation

John-Olof Rönn, Leevi Pesonen, Mikael Saarniheimo, Sami Sneck, and Kalle Niiranen "Atomic layer deposition of gradient-index anti-reflective coatings: eliminating the performance limitations of traditional optical coatings", Proc. SPIE PC12778, Optifab 2023, PC127780G (30 November 2023); https://doi.org/10.1117/12.2688606

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