MBMW-100 flex, the 1st electron multi-beam mask writer for mature and advanced mask nodes

Mathias Tomandl; Christof Klein; Hans Loeschner; Elmar Platzgummer

doi:10.1117/12.2688257

22 November 2023 MBMW-100 flex, the 1st electron multi-beam mask writer for mature and advanced mask nodes

Mathias Tomandl, Christof Klein, Hans Loeschner, Elmar Platzgummer

Proceedings Volume PC12751, Photomask Technology 2023; PC127510I (2023) https://doi.org/10.1117/12.2688257
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

The Multi-Beam Mask Writer (MBMW) by IMS Nanofabrication has become the standard for photo mask patterning. The new MBMW-100 Flex extends its capabilities for mature and advanced mask node applications, offering advantages over traditional Variable Shaped Beam (VSB) writers a favorable cost of ownership. It covers a wide range of node requirements, supports various write modes, and brings the benefits of multi-beam technology to mature mask nodes. It enables the use of advanced correction techniques and low-sensitivity resists, improving pattern fidelity. Based on the successful MBMW-201, it ensures reliability and productivity. The MBMW-100 Flex is an exciting development in multi-beam technology, providing superior capabilities and overcoming VSB technology limitations.

Conference Presentation

Citation Download Citation

Mathias Tomandl, Christof Klein, Hans Loeschner, and Elmar Platzgummer "MBMW-100 flex, the 1st electron multi-beam mask writer for mature and advanced mask nodes", Proc. SPIE PC12751, Photomask Technology 2023, PC127510I (22 November 2023); https://doi.org/10.1117/12.2688257

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available