Rational design of silicone-incorporated organic light-emitting semiconductor for anisotropic micro-lithography

Hyukmin Kweon; Keun-Yeong Choi; Ryungyu Lee; Ukjin Jeong; Borina Ha; Jang-Yeon Kwon; Kwun-Bum Chung; Moon Sung Kang; Hojin Lee; Do Hwan Kim

doi:10.1117/12.2675959

6 October 2023 Rational design of silicone-incorporated organic light-emitting semiconductor for anisotropic micro-lithography

Hyukmin Kweon, Keun-Yeong Choi, Ryungyu Lee, Ukjin Jeong, Borina Ha, Jang-Yeon Kwon, Kwun-Bum Chung, Moon Sung Kang, Hojin Lee, Do Hwan Kim

Author Affiliations +

Proceedings Volume PC12659, Organic and Hybrid Light Emitting Materials and Devices XXVII; PC1265911 (2023) https://doi.org/10.1117/12.2675959
Event: SPIE Organic Photonics + Electronics, 2023, San Diego, California, United States

Conference Poster

Abstract

We have demonstrated silicone-incorporated organic light-emitting semiconductor (SI-OLES) enabling anisotropic micro-lithography with reactive ion etching (RIE)-coupled photolithography (RCP) process. The SI-OLES possesses high chemical–physical robustness, and particularly, can render silicone-based non-blocking etching layer during the RIE by mimicking RIE chemistry of silicon, so that precise anisotropic mciro-patterns of SI-OLES can be achieved by the RCP process. Consequently, we successfully fabricated ultrahigh-density RGB OLES anisotropic patterns (4,216 ppi corresponding to 4,938,271 patterns/cm2), as well as, full-color SI-OLES-based OLEDs (949 ppi) without degradation of their electroluminescence characteristics, by the application of three cycles of consecutive RCP processes.

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Hyukmin Kweon, Keun-Yeong Choi, Ryungyu Lee, Ukjin Jeong, Borina Ha, Jang-Yeon Kwon, Kwun-Bum Chung, Moon Sung Kang, Hojin Lee, and Do Hwan Kim "Rational design of silicone-incorporated organic light-emitting semiconductor for anisotropic micro-lithography", Proc. SPIE PC12659, Organic and Hybrid Light Emitting Materials and Devices XXVII, PC1265911 (6 October 2023); https://doi.org/10.1117/12.2675959

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