Presentation
23 August 2023 Advanced in situ metrology for large aperture flat mirrors
Erhui Qi, Haixiang Hu, Xiao Luo, Zhenyu Liu
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Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Erhui Qi, Haixiang Hu, Xiao Luo, and Zhenyu Liu "Advanced in situ metrology for large aperture flat mirrors", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC1261904 (23 August 2023); https://doi.org/10.1117/12.2673949
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KEYWORDS
Mirrors

Metrology

Manufacturing

Mirror surfaces

Surface finishing

Polishing

Testing and analysis

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